FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2149254467> ?p ?o ?g. }

• W2149254467 endingPage "566" @default.
• W2149254467 startingPage "562" @default.
• W2149254467 abstract "A 13.56 MHz parallel plate hydrogen-diluted silane plasma, operated at high pressure and high power, was used to deposit microcrystalline silicon solar cells with efficiencies of 6–9% at high deposition rates of 0.4–1.2 nm/s. In this regime new challenges arise regarding temperature control, since the high plasma power causes the substrate to heat up significantly during film deposition. We investigated this effect of plasma-induced substrate heating experimentally by means of pyrometric substrate temperature measurements and spectroscopic gas temperature measurements. The substrate temperature was observed to increase by up to 100 K during film deposition, depending on power density and deposition time. Performance of deposited solar cells decreased whenever the plasma induced heating caused a drift outside the ideal temperature window, of around 475 K (∼200 °C). Further analysis related this decrease in performance to the substrate temperature's influence on film crystallinity and open circuit voltage." @default.
• W2149254467 created "2016-06-24" @default.
• W2149254467 creator A5030039866 @default.
• W2149254467 creator A5041874834 @default.
• W2149254467 creator A5044882315 @default.
• W2149254467 creator A5050012236 @default.
• W2149254467 creator A5050864455 @default.
• W2149254467 creator A5084773863 @default.
• W2149254467 date "2006-07-01" @default.
• W2149254467 modified "2023-10-14" @default.
• W2149254467 title "The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells" @default.
• W2149254467 cites W1669196377 @default.
• W2149254467 cites W1963749546 @default.
• W2149254467 cites W1977288164 @default.
• W2149254467 cites W1985158259 @default.
• W2149254467 cites W1992235941 @default.
• W2149254467 cites W1998501074 @default.
• W2149254467 cites W2010290295 @default.
• W2149254467 cites W2011413488 @default.
• W2149254467 cites W2022493135 @default.
• W2149254467 cites W2037147597 @default.
• W2149254467 cites W2041544825 @default.
• W2149254467 cites W2063732660 @default.
• W2149254467 cites W2072952343 @default.
• W2149254467 cites W2073168892 @default.
• W2149254467 cites W2081489269 @default.
• W2149254467 cites W2094628693 @default.
• W2149254467 cites W2132577866 @default.
• W2149254467 cites W2135050783 @default.
• W2149254467 cites W4240905921 @default.
• W2149254467 doi "https://doi.org/10.1016/j.tsf.2005.12.167" @default.
• W2149254467 hasPublicationYear "2006" @default.
• W2149254467 type Work @default.
• W2149254467 sameAs 2149254467 @default.
• W2149254467 citedByCount "32" @default.
• W2149254467 countsByYear W21492544672012 @default.
• W2149254467 countsByYear W21492544672013 @default.
• W2149254467 countsByYear W21492544672014 @default.
• W2149254467 countsByYear W21492544672015 @default.
• W2149254467 countsByYear W21492544672016 @default.
• W2149254467 countsByYear W21492544672020 @default.
• W2149254467 crossrefType "journal-article" @default.
• W2149254467 hasAuthorship W2149254467A5030039866 @default.
• W2149254467 hasAuthorship W2149254467A5041874834 @default.
• W2149254467 hasAuthorship W2149254467A5044882315 @default.
• W2149254467 hasAuthorship W2149254467A5050012236 @default.
• W2149254467 hasAuthorship W2149254467A5050864455 @default.
• W2149254467 hasAuthorship W2149254467A5084773863 @default.
• W2149254467 hasConcept C107872376 @default.
• W2149254467 hasConcept C111368507 @default.
• W2149254467 hasConcept C113196181 @default.
• W2149254467 hasConcept C121332964 @default.
• W2149254467 hasConcept C127313418 @default.
• W2149254467 hasConcept C151730666 @default.
• W2149254467 hasConcept C159985019 @default.
• W2149254467 hasConcept C185592680 @default.
• W2149254467 hasConcept C192562407 @default.
• W2149254467 hasConcept C201370411 @default.
• W2149254467 hasConcept C2777289219 @default.
• W2149254467 hasConcept C2778024649 @default.
• W2149254467 hasConcept C2816523 @default.
• W2149254467 hasConcept C46275449 @default.
• W2149254467 hasConcept C49040817 @default.
• W2149254467 hasConcept C544956773 @default.
• W2149254467 hasConcept C62520636 @default.
• W2149254467 hasConcept C64297162 @default.
• W2149254467 hasConcept C8010536 @default.
• W2149254467 hasConcept C82706917 @default.
• W2149254467 hasConcept C86803240 @default.
• W2149254467 hasConceptScore W2149254467C107872376 @default.
• W2149254467 hasConceptScore W2149254467C111368507 @default.
• W2149254467 hasConceptScore W2149254467C113196181 @default.
• W2149254467 hasConceptScore W2149254467C121332964 @default.
• W2149254467 hasConceptScore W2149254467C127313418 @default.
• W2149254467 hasConceptScore W2149254467C151730666 @default.
• W2149254467 hasConceptScore W2149254467C159985019 @default.
• W2149254467 hasConceptScore W2149254467C185592680 @default.
• W2149254467 hasConceptScore W2149254467C192562407 @default.
• W2149254467 hasConceptScore W2149254467C201370411 @default.
• W2149254467 hasConceptScore W2149254467C2777289219 @default.
• W2149254467 hasConceptScore W2149254467C2778024649 @default.
• W2149254467 hasConceptScore W2149254467C2816523 @default.
• W2149254467 hasConceptScore W2149254467C46275449 @default.
• W2149254467 hasConceptScore W2149254467C49040817 @default.
• W2149254467 hasConceptScore W2149254467C544956773 @default.
• W2149254467 hasConceptScore W2149254467C62520636 @default.
• W2149254467 hasConceptScore W2149254467C64297162 @default.
• W2149254467 hasConceptScore W2149254467C8010536 @default.
• W2149254467 hasConceptScore W2149254467C82706917 @default.
• W2149254467 hasConceptScore W2149254467C86803240 @default.
• W2149254467 hasLocation W21492544671 @default.
• W2149254467 hasOpenAccess W2149254467 @default.
• W2149254467 hasPrimaryLocation W21492544671 @default.
• W2149254467 hasRelatedWork W1966810442 @default.
• W2149254467 hasRelatedWork W1969060177 @default.
• W2149254467 hasRelatedWork W1975943059 @default.
• W2149254467 hasRelatedWork W1984496626 @default.
• W2149254467 hasRelatedWork W1995788792 @default.

• next