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- W2149257807 abstract "In this paper, we report a new and simple fabrication method for 3-D polymeric microstructures using low viscosity mineral oil-based ferrofluids in combination with polydimethylsiloxane (PDMS) and UV curable epoxy. The diameter and height of ferrofluid spikes/domes which usually form upon the application of a magnetic field was controlled by a micromachined membrane having holes of various dimensions. Holes or various dimensions (60, 100, and 200 µ m) were fabricated in a thin silicon membrane covering a ferrofluid reservoir. The heights of fabricated polymeric microstructures corresponding to the above mentioned hole sizes were equal to the hole diameters, while their base diameters were reduced by 10-30%. This approach provides a new technique to easily fabricate various size 3-D micro-structures on the same plane by controlling the magnetic field strength, ferrofluid viscosity, and hole dimensions." @default.
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- W2149257807 date "2006-05-25" @default.
- W2149257807 modified "2023-09-27" @default.
- W2149257807 title "Fabrication of Polymeric 3-D Micro-Structures Using Ferrofluid Molds" @default.
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- W2149257807 doi "https://doi.org/10.1109/memsys.2006.1627804" @default.
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