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- W2149618594 abstract "This study of friction measurements in microelectromechanical systems (MEMs) is aimed at examining static friction measurement techniques, as well as exploring the effects of environmental parameters, including nitrogen, oxygen, and argon at various pressures and humidities. The coefficients of friction between silicon nitride and silicon nitride, silicon nitride and silicon, silicon dioxide and silicon dioxide, and silicon dioxide and silicon dioxide, and silicon dioxide and silicon at various gas pressures are presented along with preliminary interpretations. Exposing the samples to argon resulted in no change in the coefficients of friction, exposing the samples to nitrogen resulted in either a decrease or no change in the coefficients of friction, and exposing the samples to oxygen resulted in an increase in the coefficients of friction. The data suggest that nitrogen acts as a lubricant and adsorbed oxygen acts as an adhesive for the silicon or silicon compound materials tested. >" @default.
- W2149618594 created "2016-06-24" @default.
- W2149618594 creator A5025849829 @default.
- W2149618594 creator A5049188994 @default.
- W2149618594 creator A5067844225 @default.
- W2149618594 date "2002-12-09" @default.
- W2149618594 modified "2023-09-25" @default.
- W2149618594 title "A preliminary study on friction measurements in MEMS" @default.
- W2149618594 cites W1901686099 @default.
- W2149618594 cites W1998348849 @default.
- W2149618594 cites W2073681172 @default.
- W2149618594 cites W2152980006 @default.
- W2149618594 cites W2921577402 @default.
- W2149618594 doi "https://doi.org/10.1109/sensor.1991.148840" @default.
- W2149618594 hasPublicationYear "2002" @default.
- W2149618594 type Work @default.
- W2149618594 sameAs 2149618594 @default.
- W2149618594 citedByCount "15" @default.
- W2149618594 crossrefType "proceedings-article" @default.
- W2149618594 hasAuthorship W2149618594A5025849829 @default.
- W2149618594 hasAuthorship W2149618594A5049188994 @default.
- W2149618594 hasAuthorship W2149618594A5067844225 @default.
- W2149618594 hasConcept C159985019 @default.
- W2149618594 hasConcept C171250308 @default.
- W2149618594 hasConcept C178790620 @default.
- W2149618594 hasConcept C185592680 @default.
- W2149618594 hasConcept C192562407 @default.
- W2149618594 hasConcept C195114451 @default.
- W2149618594 hasConcept C2777431650 @default.
- W2149618594 hasConcept C2779089622 @default.
- W2149618594 hasConcept C2780874159 @default.
- W2149618594 hasConcept C37977207 @default.
- W2149618594 hasConcept C49040817 @default.
- W2149618594 hasConcept C537208039 @default.
- W2149618594 hasConcept C540031477 @default.
- W2149618594 hasConcept C544956773 @default.
- W2149618594 hasConcept C547737533 @default.
- W2149618594 hasConceptScore W2149618594C159985019 @default.
- W2149618594 hasConceptScore W2149618594C171250308 @default.
- W2149618594 hasConceptScore W2149618594C178790620 @default.
- W2149618594 hasConceptScore W2149618594C185592680 @default.
- W2149618594 hasConceptScore W2149618594C192562407 @default.
- W2149618594 hasConceptScore W2149618594C195114451 @default.
- W2149618594 hasConceptScore W2149618594C2777431650 @default.
- W2149618594 hasConceptScore W2149618594C2779089622 @default.
- W2149618594 hasConceptScore W2149618594C2780874159 @default.
- W2149618594 hasConceptScore W2149618594C37977207 @default.
- W2149618594 hasConceptScore W2149618594C49040817 @default.
- W2149618594 hasConceptScore W2149618594C537208039 @default.
- W2149618594 hasConceptScore W2149618594C540031477 @default.
- W2149618594 hasConceptScore W2149618594C544956773 @default.
- W2149618594 hasConceptScore W2149618594C547737533 @default.
- W2149618594 hasLocation W21496185941 @default.
- W2149618594 hasOpenAccess W2149618594 @default.
- W2149618594 hasPrimaryLocation W21496185941 @default.
- W2149618594 hasRelatedWork W1991524796 @default.
- W2149618594 hasRelatedWork W1995161526 @default.
- W2149618594 hasRelatedWork W1998348849 @default.
- W2149618594 hasRelatedWork W2008450282 @default.
- W2149618594 hasRelatedWork W2016514118 @default.
- W2149618594 hasRelatedWork W2026071277 @default.
- W2149618594 hasRelatedWork W2057226672 @default.
- W2149618594 hasRelatedWork W2057873270 @default.
- W2149618594 hasRelatedWork W2062097779 @default.
- W2149618594 hasRelatedWork W2093291697 @default.
- W2149618594 hasRelatedWork W2110630289 @default.
- W2149618594 hasRelatedWork W2111016086 @default.
- W2149618594 hasRelatedWork W2151095760 @default.
- W2149618594 hasRelatedWork W2335407631 @default.
- W2149618594 hasRelatedWork W2532684437 @default.
- W2149618594 hasRelatedWork W2532953749 @default.
- W2149618594 hasRelatedWork W2543251610 @default.
- W2149618594 hasRelatedWork W2160619146 @default.
- W2149618594 hasRelatedWork W2166414080 @default.
- W2149618594 hasRelatedWork W2469585996 @default.
- W2149618594 isParatext "false" @default.
- W2149618594 isRetracted "false" @default.
- W2149618594 magId "2149618594" @default.
- W2149618594 workType "article" @default.