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- W2149645675 abstract "Lithography tools are key to meeting the requirements of the SIA Roadmap. Current generation tools are meeting the technical requirements of the 0.25 um technology, but challenges remain for the future generation." @default.
- W2149645675 created "2016-06-24" @default.
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- W2149645675 date "2002-11-23" @default.
- W2149645675 modified "2023-09-25" @default.
- W2149645675 title "Capabilities of existing lithography tools" @default.
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- W2149645675 doi "https://doi.org/10.1109/iemt.1997.626942" @default.
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