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• W2149661817 abstract "We demonstrate the design and fabrication of a highly efficient guided-mode resonant color filter array. The device is designed using numerical methods based on rigorous coupled-wave analysis and is patterned using UV-laser interferometric lithography. It consists of a 60-nm-thick subwavelength silicon nitride grating along with a 105-nm-thick homogeneous silicon nitride waveguide on a glass substrate. The fabricated device exhibits blue, green, and red color response for grating periods of 274, 327, and 369 nm, respectively. The pixels have a spectral bandwidth of ~12 nm with efficiencies of 94%, 96%, and 99% at the center wavelength of blue, green, and red color filter, respectively. These are higher efficiencies than reported in the literature previously." @default.
• W2149661817 created "2016-06-24" @default.
• W2149661817 creator A5035086253 @default.
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• W2149661817 date "2013-05-14" @default.
• W2149661817 modified "2023-09-28" @default.
• W2149661817 title "Highly efficient color filter array using resonant Si_3N_4 gratings" @default.
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• W2149661817 doi "https://doi.org/10.1364/oe.21.012495" @default.
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• W2149661817 hasPublicationYear "2013" @default.
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