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- W2149664533 abstract "This paper presents very reliable and stable micro- mirrors made of hydrogenated microcrystalline SiGe (muc-SiGe:H) at temperatures that would allow processing above standard CMOS circuitry. Very flat micro-mirrors with sizes ranging between 7.5 x 7.5 and 16 x 16 mum <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> size and submicron hinges are fabricated. No hinge creep is observed over a period of 20 days and no fatigue damage is seen after 5 x 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>10</sup> cycles." @default.
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- W2149664533 date "2007-01-01" @default.
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- W2149664533 title "Highly reliable and extremely stable SiGe micro-mirrors" @default.
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- W2149664533 doi "https://doi.org/10.1109/memsys.2007.4433173" @default.
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