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- W2149718872 endingPage "2010" @default.
- W2149718872 startingPage "2008" @default.
- W2149718872 abstract "We report on the stability of sputter-deposited tungsten silicide (WSi2.6) films that were implanted with boron or phosphorus and annealed at high temperatures using rapid thermal annealing. Depending on process conditions, some films were found to be unstable, resulting in peeling and lifting from the substrate. The regime of stability was experimentally determined and found to be a function of the implant dose, species, and anneal temperature. Films implanted with boron were found to be more stable than those implanted with phosphorus. With the appropriate choice of dopant dose, anneal temperature, and capping layer type, the film stacks were found to be stable upon subsequent furnace annealing steps at 900 °C." @default.
- W2149718872 created "2016-06-24" @default.
- W2149718872 creator A5050715203 @default.
- W2149718872 creator A5083989371 @default.
- W2149718872 date "2000-07-01" @default.
- W2149718872 modified "2023-09-26" @default.
- W2149718872 title "Stability of boron and phosphorus implanted tungsten silicide structures at high temperatures" @default.
- W2149718872 cites W1987217197 @default.
- W2149718872 cites W2012586507 @default.
- W2149718872 cites W2057633042 @default.
- W2149718872 cites W2071237865 @default.
- W2149718872 cites W2131908994 @default.
- W2149718872 cites W2158599772 @default.
- W2149718872 doi "https://doi.org/10.1116/1.1305291" @default.
- W2149718872 hasPublicationYear "2000" @default.
- W2149718872 type Work @default.
- W2149718872 sameAs 2149718872 @default.
- W2149718872 citedByCount "0" @default.
- W2149718872 crossrefType "journal-article" @default.
- W2149718872 hasAuthorship W2149718872A5050715203 @default.
- W2149718872 hasAuthorship W2149718872A5083989371 @default.
- W2149718872 hasConcept C127413603 @default.
- W2149718872 hasConcept C145148216 @default.
- W2149718872 hasConcept C171250308 @default.
- W2149718872 hasConcept C178790620 @default.
- W2149718872 hasConcept C185592680 @default.
- W2149718872 hasConcept C19067145 @default.
- W2149718872 hasConcept C191897082 @default.
- W2149718872 hasConcept C191952053 @default.
- W2149718872 hasConcept C192562407 @default.
- W2149718872 hasConcept C22423302 @default.
- W2149718872 hasConcept C2777855556 @default.
- W2149718872 hasConcept C2780901251 @default.
- W2149718872 hasConcept C41823505 @default.
- W2149718872 hasConcept C42360764 @default.
- W2149718872 hasConcept C49040817 @default.
- W2149718872 hasConcept C501308230 @default.
- W2149718872 hasConcept C542268612 @default.
- W2149718872 hasConcept C544956773 @default.
- W2149718872 hasConcept C57863236 @default.
- W2149718872 hasConcept C59061564 @default.
- W2149718872 hasConcept C61427134 @default.
- W2149718872 hasConceptScore W2149718872C127413603 @default.
- W2149718872 hasConceptScore W2149718872C145148216 @default.
- W2149718872 hasConceptScore W2149718872C171250308 @default.
- W2149718872 hasConceptScore W2149718872C178790620 @default.
- W2149718872 hasConceptScore W2149718872C185592680 @default.
- W2149718872 hasConceptScore W2149718872C19067145 @default.
- W2149718872 hasConceptScore W2149718872C191897082 @default.
- W2149718872 hasConceptScore W2149718872C191952053 @default.
- W2149718872 hasConceptScore W2149718872C192562407 @default.
- W2149718872 hasConceptScore W2149718872C22423302 @default.
- W2149718872 hasConceptScore W2149718872C2777855556 @default.
- W2149718872 hasConceptScore W2149718872C2780901251 @default.
- W2149718872 hasConceptScore W2149718872C41823505 @default.
- W2149718872 hasConceptScore W2149718872C42360764 @default.
- W2149718872 hasConceptScore W2149718872C49040817 @default.
- W2149718872 hasConceptScore W2149718872C501308230 @default.
- W2149718872 hasConceptScore W2149718872C542268612 @default.
- W2149718872 hasConceptScore W2149718872C544956773 @default.
- W2149718872 hasConceptScore W2149718872C57863236 @default.
- W2149718872 hasConceptScore W2149718872C59061564 @default.
- W2149718872 hasConceptScore W2149718872C61427134 @default.
- W2149718872 hasIssue "4" @default.
- W2149718872 hasLocation W21497188721 @default.
- W2149718872 hasOpenAccess W2149718872 @default.
- W2149718872 hasPrimaryLocation W21497188721 @default.
- W2149718872 hasRelatedWork W1966205888 @default.
- W2149718872 hasRelatedWork W1996331863 @default.
- W2149718872 hasRelatedWork W1997428111 @default.
- W2149718872 hasRelatedWork W2033669323 @default.
- W2149718872 hasRelatedWork W2048269824 @default.
- W2149718872 hasRelatedWork W2052759331 @default.
- W2149718872 hasRelatedWork W2065669148 @default.
- W2149718872 hasRelatedWork W2078509465 @default.
- W2149718872 hasRelatedWork W2275386326 @default.
- W2149718872 hasRelatedWork W3194481887 @default.
- W2149718872 hasVolume "18" @default.
- W2149718872 isParatext "false" @default.
- W2149718872 isRetracted "false" @default.
- W2149718872 magId "2149718872" @default.
- W2149718872 workType "article" @default.