FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2149753710> ?p ?o ?g. }

• W2149753710 abstract "Summary form only given. To improve the reproducibility of metal-containing, hydrogenated diamond-like carbon (Me-DLC:H) coatings deposited by physical vapor deposition (PVD) techniques such as reactive sputtering, various plasma probes have been studied as potential in-situ sensors integrated with a closed-loop deposition control system. In a series of Design-of-Experiment (DoE) test runs on an unbalanced magnetron sputtering setup, the plasma probes were tested for their sensitivity to process input factors and as candidates for a feedback control system. These include optical emission and absorption spectroscopy of metal atoms, conventional and electron emissive Langmuir probes, and hydrogen atomic line emission at 656.3 nm (H/sub /spl square//). An important result of these studies was that Ha is potentially an ideal control sensor, because of the apparent high sensitivity of the total emission to changes in the film deposition chemistry that tend to occur naturally during the course of deposition of the functional coatings. A more detailed analysis of the spectral profile of H/sub /spl alpha// for the various regimes of the deposition have shown that the emission is dominated by a hot component (/spl sim/20 eV), which can be attributed to dissociative excitation of molecular hydrogen. Since electron collisional dissociation of hydrocarbons in the plasma can only produce atomic hydrogen (the observed cold component), it is inferred that the Ha is a measure of hydrogen generation in the film, thus confirming the concept that it can be used as a deposition chemistry probe. As such, it can take the form of a compact photo-detector with an H/sub /spl alpha// interference filter, providing economy, as well as fast time response. Another benefit of H/sub /spl alpha// emission that it can be used as a sensor for any type of DLC:H, including nano-structured (carbide-containing) Me:DLC:H coatings, produced for tribological applications." @default.
• W2149753710 created "2016-06-24" @default.
• W2149753710 creator A5022424402 @default.
• W2149753710 creator A5028711446 @default.
• W2149753710 creator A5067926751 @default.
• W2149753710 creator A5083403756 @default.
• W2149753710 creator A5083932903 @default.
• W2149753710 creator A5085082878 @default.
• W2149753710 date "2004-11-08" @default.
• W2149753710 modified "2023-09-25" @default.
• W2149753710 title "H/sub α/ emission as a plasma vapor deposition control sensor for tribological, diamond-like carbon coatings" @default.
• W2149753710 doi "https://doi.org/10.1109/plasma.2004.1339721" @default.
• W2149753710 hasPublicationYear "2004" @default.
• W2149753710 type Work @default.
• W2149753710 sameAs 2149753710 @default.
• W2149753710 citedByCount "0" @default.
• W2149753710 crossrefType "proceedings-article" @default.
• W2149753710 hasAuthorship W2149753710A5022424402 @default.
• W2149753710 hasAuthorship W2149753710A5028711446 @default.
• W2149753710 hasAuthorship W2149753710A5067926751 @default.
• W2149753710 hasAuthorship W2149753710A5083403756 @default.
• W2149753710 hasAuthorship W2149753710A5083932903 @default.
• W2149753710 hasAuthorship W2149753710A5085082878 @default.
• W2149753710 hasConcept C102931765 @default.
• W2149753710 hasConcept C104779481 @default.
• W2149753710 hasConcept C113196181 @default.
• W2149753710 hasConcept C121332964 @default.
• W2149753710 hasConcept C123380192 @default.
• W2149753710 hasConcept C123408415 @default.
• W2149753710 hasConcept C140205800 @default.
• W2149753710 hasConcept C147789679 @default.
• W2149753710 hasConcept C151730666 @default.
• W2149753710 hasConcept C159985019 @default.
• W2149753710 hasConcept C171250308 @default.
• W2149753710 hasConcept C175361016 @default.
• W2149753710 hasConcept C176118016 @default.
• W2149753710 hasConcept C178790620 @default.
• W2149753710 hasConcept C185592680 @default.
• W2149753710 hasConcept C19067145 @default.
• W2149753710 hasConcept C192562407 @default.
• W2149753710 hasConcept C22423302 @default.
• W2149753710 hasConcept C2776921476 @default.
• W2149753710 hasConcept C2816523 @default.
• W2149753710 hasConcept C43503373 @default.
• W2149753710 hasConcept C43617362 @default.
• W2149753710 hasConcept C512968161 @default.
• W2149753710 hasConcept C51576277 @default.
• W2149753710 hasConcept C57410435 @default.
• W2149753710 hasConcept C61427134 @default.
• W2149753710 hasConcept C62520636 @default.
• W2149753710 hasConcept C64297162 @default.
• W2149753710 hasConcept C75937256 @default.
• W2149753710 hasConcept C82706917 @default.
• W2149753710 hasConcept C86803240 @default.
• W2149753710 hasConceptScore W2149753710C102931765 @default.
• W2149753710 hasConceptScore W2149753710C104779481 @default.
• W2149753710 hasConceptScore W2149753710C113196181 @default.
• W2149753710 hasConceptScore W2149753710C121332964 @default.
• W2149753710 hasConceptScore W2149753710C123380192 @default.
• W2149753710 hasConceptScore W2149753710C123408415 @default.
• W2149753710 hasConceptScore W2149753710C140205800 @default.
• W2149753710 hasConceptScore W2149753710C147789679 @default.
• W2149753710 hasConceptScore W2149753710C151730666 @default.
• W2149753710 hasConceptScore W2149753710C159985019 @default.
• W2149753710 hasConceptScore W2149753710C171250308 @default.
• W2149753710 hasConceptScore W2149753710C175361016 @default.
• W2149753710 hasConceptScore W2149753710C176118016 @default.
• W2149753710 hasConceptScore W2149753710C178790620 @default.
• W2149753710 hasConceptScore W2149753710C185592680 @default.
• W2149753710 hasConceptScore W2149753710C19067145 @default.
• W2149753710 hasConceptScore W2149753710C192562407 @default.
• W2149753710 hasConceptScore W2149753710C22423302 @default.
• W2149753710 hasConceptScore W2149753710C2776921476 @default.
• W2149753710 hasConceptScore W2149753710C2816523 @default.
• W2149753710 hasConceptScore W2149753710C43503373 @default.
• W2149753710 hasConceptScore W2149753710C43617362 @default.
• W2149753710 hasConceptScore W2149753710C512968161 @default.
• W2149753710 hasConceptScore W2149753710C51576277 @default.
• W2149753710 hasConceptScore W2149753710C57410435 @default.
• W2149753710 hasConceptScore W2149753710C61427134 @default.
• W2149753710 hasConceptScore W2149753710C62520636 @default.
• W2149753710 hasConceptScore W2149753710C64297162 @default.
• W2149753710 hasConceptScore W2149753710C75937256 @default.
• W2149753710 hasConceptScore W2149753710C82706917 @default.
• W2149753710 hasConceptScore W2149753710C86803240 @default.
• W2149753710 hasLocation W21497537101 @default.
• W2149753710 hasOpenAccess W2149753710 @default.
• W2149753710 hasPrimaryLocation W21497537101 @default.
• W2149753710 hasRelatedWork W1015777262 @default.
• W2149753710 hasRelatedWork W103344507 @default.
• W2149753710 hasRelatedWork W1865185928 @default.
• W2149753710 hasRelatedWork W1970841698 @default.
• W2149753710 hasRelatedWork W1976397635 @default.
• W2149753710 hasRelatedWork W1979675136 @default.
• W2149753710 hasRelatedWork W1983914403 @default.
• W2149753710 hasRelatedWork W2010651594 @default.
• W2149753710 hasRelatedWork W2041740304 @default.
• W2149753710 hasRelatedWork W2056810579 @default.
• W2149753710 hasRelatedWork W2067209608 @default.
• W2149753710 hasRelatedWork W2326375953 @default.

• next