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- W2149803468 abstract "A systematic study of the etching of multilayer polymer stacks using an inductively coupled plasma (ICP) has been performed. The optimized parameters were used to etch smooth vertical features in a three-layer polymer device, which are suitable for use as low-loss waveguide facets. Waveguide facets of sufficient optical quality to allow the direct coupling of the output from an actively aligned super luminescent diode (SLD) with a coupling efficiency of 40% have been demonstrated. The ability to fabricate optical-quality waveguide facets through a dry etching process, rather than mechanical means such as dicing, can enable the production of compact highly integrated optical devices." @default.
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- W2149803468 date "2005-04-01" @default.
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- W2149803468 title "Fabrication of low-loss optical-quality polymer waveguide facets in multilayer polymer devices using an inductively coupled plasma" @default.
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- W2149803468 doi "https://doi.org/10.1109/jlt.2005.843839" @default.
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