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- W2149881015 abstract "This paper presents a low-cost low-temperature packaging technique for wafer-level encapsulation of MEMS devices fabricated on any arbitrary substrate. The packaging process presented here does not involve wafer bonding and can be applied to a wide variety of MEMS devices after their fabrication sequence is completed. Our technique utilizes thermal decomposition of a sacrificial polymeric material through a polymer overcoat cap, and can be applied to both surface and bulk micromachined structures. Encapsulation of high-g silicon-on-insulator resonators, and thick silicon gyroscopes and accelerometers are presented." @default.
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- W2149881015 date "2005-07-06" @default.
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- W2149881015 title "A low cost wafer-level MEMS packaging technology" @default.
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- W2149881015 doi "https://doi.org/10.1109/memsys.2005.1454009" @default.
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