Matches in SemOpenAlex for { <https://semopenalex.org/work/W2149957287> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2149957287 abstract "In semiconductor manufacturing processes, mixed-products are usually fabricated on the same set of process tool with different recipes. Run-to-Run controllers which based on the exponential weighted moving average (EWMA) statistic are probably the most frequently used in industry for the quality control of certain semiconductor manufacturing process steps. However, for mixed-product drifting process, if the break length of a product is large, then the process output at the beginning runs of cycle 1,2,… will be far deviated from target which will lead to a possible high rework rate and lots of waste wafers. Therefore, this study aims to develop a cycle prediction EWMA (CP-EWMA) approach to deal with the problem of large deviations in the first few runs of cycle 1,2,…. Simulation study showed that the proposed approaches are effective." @default.
- W2149957287 created "2016-06-24" @default.
- W2149957287 creator A5003708121 @default.
- W2149957287 creator A5013737245 @default.
- W2149957287 creator A5045316952 @default.
- W2149957287 creator A5048341197 @default.
- W2149957287 creator A5086023611 @default.
- W2149957287 date "2009-12-01" @default.
- W2149957287 modified "2023-10-18" @default.
- W2149957287 title "Cycle prediction EWMA run-to-run controller for mixed-product drifting process" @default.
- W2149957287 cites W1549818157 @default.
- W2149957287 cites W1966573855 @default.
- W2149957287 cites W1968621901 @default.
- W2149957287 cites W1970982546 @default.
- W2149957287 cites W1986758741 @default.
- W2149957287 cites W2014127315 @default.
- W2149957287 cites W2065799639 @default.
- W2149957287 cites W2069105461 @default.
- W2149957287 cites W2104897439 @default.
- W2149957287 cites W2119744282 @default.
- W2149957287 cites W2133416631 @default.
- W2149957287 cites W2149045179 @default.
- W2149957287 cites W2159375928 @default.
- W2149957287 cites W2163213751 @default.
- W2149957287 cites W2284090526 @default.
- W2149957287 cites W3125071194 @default.
- W2149957287 doi "https://doi.org/10.1109/cdc.2009.5400660" @default.
- W2149957287 hasPublicationYear "2009" @default.
- W2149957287 type Work @default.
- W2149957287 sameAs 2149957287 @default.
- W2149957287 citedByCount "2" @default.
- W2149957287 countsByYear W21499572872015 @default.
- W2149957287 countsByYear W21499572872016 @default.
- W2149957287 crossrefType "proceedings-article" @default.
- W2149957287 hasAuthorship W2149957287A5003708121 @default.
- W2149957287 hasAuthorship W2149957287A5013737245 @default.
- W2149957287 hasAuthorship W2149957287A5045316952 @default.
- W2149957287 hasAuthorship W2149957287A5048341197 @default.
- W2149957287 hasAuthorship W2149957287A5086023611 @default.
- W2149957287 hasConcept C105795698 @default.
- W2149957287 hasConcept C111919701 @default.
- W2149957287 hasConcept C113644684 @default.
- W2149957287 hasConcept C119599485 @default.
- W2149957287 hasConcept C127413603 @default.
- W2149957287 hasConcept C149635348 @default.
- W2149957287 hasConcept C160671074 @default.
- W2149957287 hasConcept C196985124 @default.
- W2149957287 hasConcept C200601418 @default.
- W2149957287 hasConcept C21880701 @default.
- W2149957287 hasConcept C2524010 @default.
- W2149957287 hasConcept C2776543023 @default.
- W2149957287 hasConcept C33923547 @default.
- W2149957287 hasConcept C41008148 @default.
- W2149957287 hasConcept C66018809 @default.
- W2149957287 hasConcept C74746147 @default.
- W2149957287 hasConcept C89128539 @default.
- W2149957287 hasConcept C90673727 @default.
- W2149957287 hasConcept C98045186 @default.
- W2149957287 hasConceptScore W2149957287C105795698 @default.
- W2149957287 hasConceptScore W2149957287C111919701 @default.
- W2149957287 hasConceptScore W2149957287C113644684 @default.
- W2149957287 hasConceptScore W2149957287C119599485 @default.
- W2149957287 hasConceptScore W2149957287C127413603 @default.
- W2149957287 hasConceptScore W2149957287C149635348 @default.
- W2149957287 hasConceptScore W2149957287C160671074 @default.
- W2149957287 hasConceptScore W2149957287C196985124 @default.
- W2149957287 hasConceptScore W2149957287C200601418 @default.
- W2149957287 hasConceptScore W2149957287C21880701 @default.
- W2149957287 hasConceptScore W2149957287C2524010 @default.
- W2149957287 hasConceptScore W2149957287C2776543023 @default.
- W2149957287 hasConceptScore W2149957287C33923547 @default.
- W2149957287 hasConceptScore W2149957287C41008148 @default.
- W2149957287 hasConceptScore W2149957287C66018809 @default.
- W2149957287 hasConceptScore W2149957287C74746147 @default.
- W2149957287 hasConceptScore W2149957287C89128539 @default.
- W2149957287 hasConceptScore W2149957287C90673727 @default.
- W2149957287 hasConceptScore W2149957287C98045186 @default.
- W2149957287 hasLocation W21499572871 @default.
- W2149957287 hasOpenAccess W2149957287 @default.
- W2149957287 hasPrimaryLocation W21499572871 @default.
- W2149957287 hasRelatedWork W2030860155 @default.
- W2149957287 hasRelatedWork W2149957287 @default.
- W2149957287 hasRelatedWork W2160483537 @default.
- W2149957287 hasRelatedWork W2361892065 @default.
- W2149957287 hasRelatedWork W2543670800 @default.
- W2149957287 hasRelatedWork W3174097983 @default.
- W2149957287 hasRelatedWork W3213078993 @default.
- W2149957287 hasRelatedWork W4214643902 @default.
- W2149957287 hasRelatedWork W4292623963 @default.
- W2149957287 hasRelatedWork W99948892 @default.
- W2149957287 isParatext "false" @default.
- W2149957287 isRetracted "false" @default.
- W2149957287 magId "2149957287" @default.
- W2149957287 workType "article" @default.