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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2150347298> ?p ?o ?g. }

• W2150347298 endingPage "441" @default.
• W2150347298 startingPage "433" @default.
• W2150347298 abstract "This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</i> -, <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</i> -, and <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>z</i> -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed." @default.
• W2150347298 created "2016-06-24" @default.
• W2150347298 creator A5006427311 @default.
• W2150347298 creator A5033761866 @default.
• W2150347298 creator A5076781971 @default.
• W2150347298 date "2009-04-01" @default.
• W2150347298 modified "2023-10-11" @default.
• W2150347298 title "A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution" @default.
• W2150347298 cites W1523901194 @default.
• W2150347298 cites W1587340994 @default.
• W2150347298 cites W1966866553 @default.
• W2150347298 cites W1981684926 @default.
• W2150347298 cites W1994710268 @default.
• W2150347298 cites W2013726581 @default.
• W2150347298 cites W2017588405 @default.
• W2150347298 cites W2023362441 @default.
• W2150347298 cites W2028403103 @default.
• W2150347298 cites W2043267873 @default.
• W2150347298 cites W2076540724 @default.
• W2150347298 cites W2083784951 @default.
• W2150347298 cites W2095458047 @default.
• W2150347298 cites W2117299656 @default.
• W2150347298 cites W2127463408 @default.
• W2150347298 cites W2147118753 @default.
• W2150347298 cites W2156746603 @default.
• W2150347298 cites W2332824666 @default.
• W2150347298 cites W4234569565 @default.
• W2150347298 doi "https://doi.org/10.1109/jmems.2009.2013387" @default.
• W2150347298 hasPublicationYear "2009" @default.
• W2150347298 type Work @default.
• W2150347298 sameAs 2150347298 @default.
• W2150347298 citedByCount "128" @default.
• W2150347298 countsByYear W21503472982012 @default.
• W2150347298 countsByYear W21503472982013 @default.
• W2150347298 countsByYear W21503472982014 @default.
• W2150347298 countsByYear W21503472982015 @default.
• W2150347298 countsByYear W21503472982016 @default.
• W2150347298 countsByYear W21503472982017 @default.
• W2150347298 countsByYear W21503472982018 @default.
• W2150347298 countsByYear W21503472982019 @default.
• W2150347298 countsByYear W21503472982020 @default.
• W2150347298 countsByYear W21503472982021 @default.
• W2150347298 countsByYear W21503472982022 @default.
• W2150347298 countsByYear W21503472982023 @default.
• W2150347298 crossrefType "journal-article" @default.
• W2150347298 hasAuthorship W2150347298A5006427311 @default.
• W2150347298 hasAuthorship W2150347298A5033761866 @default.
• W2150347298 hasAuthorship W2150347298A5076781971 @default.
• W2150347298 hasConcept C119599485 @default.
• W2150347298 hasConcept C121332964 @default.
• W2150347298 hasConcept C127413603 @default.
• W2150347298 hasConcept C136525101 @default.
• W2150347298 hasConcept C142724271 @default.
• W2150347298 hasConcept C144171764 @default.
• W2150347298 hasConcept C16345878 @default.
• W2150347298 hasConcept C165801399 @default.
• W2150347298 hasConcept C165838908 @default.
• W2150347298 hasConcept C204787440 @default.
• W2150347298 hasConcept C2524010 @default.
• W2150347298 hasConcept C33923547 @default.
• W2150347298 hasConcept C37977207 @default.
• W2150347298 hasConcept C49040817 @default.
• W2150347298 hasConcept C52192207 @default.
• W2150347298 hasConcept C62520636 @default.
• W2150347298 hasConcept C71924100 @default.
• W2150347298 hasConcept C97355855 @default.
• W2150347298 hasConceptScore W2150347298C119599485 @default.
• W2150347298 hasConceptScore W2150347298C121332964 @default.
• W2150347298 hasConceptScore W2150347298C127413603 @default.
• W2150347298 hasConceptScore W2150347298C136525101 @default.
• W2150347298 hasConceptScore W2150347298C142724271 @default.
• W2150347298 hasConceptScore W2150347298C144171764 @default.
• W2150347298 hasConceptScore W2150347298C16345878 @default.
• W2150347298 hasConceptScore W2150347298C165801399 @default.
• W2150347298 hasConceptScore W2150347298C165838908 @default.
• W2150347298 hasConceptScore W2150347298C204787440 @default.
• W2150347298 hasConceptScore W2150347298C2524010 @default.
• W2150347298 hasConceptScore W2150347298C33923547 @default.
• W2150347298 hasConceptScore W2150347298C37977207 @default.
• W2150347298 hasConceptScore W2150347298C49040817 @default.
• W2150347298 hasConceptScore W2150347298C52192207 @default.
• W2150347298 hasConceptScore W2150347298C62520636 @default.
• W2150347298 hasConceptScore W2150347298C71924100 @default.
• W2150347298 hasConceptScore W2150347298C97355855 @default.
• W2150347298 hasIssue "2" @default.
• W2150347298 hasLocation W21503472981 @default.
• W2150347298 hasOpenAccess W2150347298 @default.
• W2150347298 hasPrimaryLocation W21503472981 @default.
• W2150347298 hasRelatedWork W2030847933 @default.
• W2150347298 hasRelatedWork W2082927930 @default.
• W2150347298 hasRelatedWork W2150274394 @default.
• W2150347298 hasRelatedWork W2164992503 @default.
• W2150347298 hasRelatedWork W2166962045 @default.
• W2150347298 hasRelatedWork W2256296865 @default.
• W2150347298 hasRelatedWork W2470591551 @default.
• W2150347298 hasRelatedWork W2547526529 @default.
• W2150347298 hasRelatedWork W2914189354 @default.
• W2150347298 hasRelatedWork W358558534 @default.

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