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- W2150505836 abstract "A thin layer measurement exploiting the change of complex coil impedance is a contactless method for conductive-layer diagnostics. The analysed sample is inserted into the leakage field of the coil. The coil impedance is evaluated by an electronic system. A special algorithm, ensuring the explicit evaluation of the measuring, is used for determining the layer thickness or sheet resistance." @default.
- W2150505836 created "2016-06-24" @default.
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- W2150505836 date "2010-05-01" @default.
- W2150505836 modified "2023-10-17" @default.
- W2150505836 title "Contactless measurement of thin metallic films" @default.
- W2150505836 cites W2031498913 @default.
- W2150505836 doi "https://doi.org/10.1109/miel.2010.5490522" @default.
- W2150505836 hasPublicationYear "2010" @default.
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