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• W2150642007 endingPage "1751" @default.
• W2150642007 startingPage "1751" @default.
• W2150642007 abstract "The feasibility of InSbTe (IST) chalcogenide new materials by metalorganic chemical vapor deposition (MOCVD) was demonstrated for PRAM applications. IST-MOCVD at a low temperature of 250 °C resulted in a favorable conformal deposition in the trench structure with a high aspect ratio. The IST films grown at 250 °C showed the highest resistance of approximately 108 Ω/sq, suggesting the amorphous phase of IST and the films grown at 300 °C include various crystalline phases of IST, In–Sb, and In–Te. MOCVD-IST films exhibited a step-coverage of about 95% in the trench structure with a 5 : 1 aspect ratio (a height of 500 nm and a diameter of 100 nm) and also showed reliable filling of the trench under appropriate deposition conditions. Phase switching between amorphous and crystalline states in the IST films grown on a trench structure at a high-aspect ratio (3.5 : 1) was demonstrated showing functional characteristics for applications in memory devices. The IST-based chalcogenide films used included various crystallized phases of In–Sb–Te, In–Sb and In–Te, which proved to be favorable for multilevel data storage." @default.
• W2150642007 created "2016-06-24" @default.
• W2150642007 creator A5020986955 @default.
• W2150642007 creator A5028567565 @default.
• W2150642007 creator A5040586121 @default.
• W2150642007 creator A5044034639 @default.
• W2150642007 creator A5049872669 @default.
• W2150642007 creator A5050534282 @default.
• W2150642007 creator A5061018029 @default.
• W2150642007 date "2010-01-01" @default.
• W2150642007 modified "2023-09-27" @default.
• W2150642007 title "Metalorganic chemical vapor deposition of non-GST chalcogenide materials for phase change memory applications" @default.
• W2150642007 cites W1661646169 @default.
• W2150642007 cites W1666275182 @default.
• W2150642007 cites W1859156506 @default.
• W2150642007 cites W1978403958 @default.
• W2150642007 cites W2000634138 @default.
• W2150642007 cites W2014034579 @default.
• W2150642007 cites W2014492441 @default.
• W2150642007 cites W2019839914 @default.
• W2150642007 cites W2021524892 @default.
• W2150642007 cites W2026804797 @default.
• W2150642007 cites W2074856613 @default.
• W2150642007 cites W2126775462 @default.
• W2150642007 doi "https://doi.org/10.1039/b922398c" @default.
• W2150642007 hasPublicationYear "2010" @default.
• W2150642007 type Work @default.
• W2150642007 sameAs 2150642007 @default.
• W2150642007 citedByCount "15" @default.
• W2150642007 countsByYear W21506420072012 @default.
• W2150642007 countsByYear W21506420072014 @default.
• W2150642007 countsByYear W21506420072015 @default.
• W2150642007 countsByYear W21506420072016 @default.
• W2150642007 countsByYear W21506420072018 @default.
• W2150642007 countsByYear W21506420072020 @default.
• W2150642007 countsByYear W21506420072021 @default.
• W2150642007 countsByYear W21506420072022 @default.
• W2150642007 crossrefType "journal-article" @default.
• W2150642007 hasAuthorship W2150642007A5020986955 @default.
• W2150642007 hasAuthorship W2150642007A5028567565 @default.
• W2150642007 hasAuthorship W2150642007A5040586121 @default.
• W2150642007 hasAuthorship W2150642007A5044034639 @default.
• W2150642007 hasAuthorship W2150642007A5049872669 @default.
• W2150642007 hasAuthorship W2150642007A5050534282 @default.
• W2150642007 hasAuthorship W2150642007A5061018029 @default.
• W2150642007 hasConcept C121332964 @default.
• W2150642007 hasConcept C127413603 @default.
• W2150642007 hasConcept C133256868 @default.
• W2150642007 hasConcept C151730666 @default.
• W2150642007 hasConcept C171250308 @default.
• W2150642007 hasConcept C178790620 @default.
• W2150642007 hasConcept C183866003 @default.
• W2150642007 hasConcept C185592680 @default.
• W2150642007 hasConcept C19067145 @default.
• W2150642007 hasConcept C192562407 @default.
• W2150642007 hasConcept C2778177714 @default.
• W2150642007 hasConcept C2779227376 @default.
• W2150642007 hasConcept C2816523 @default.
• W2150642007 hasConcept C3018640491 @default.
• W2150642007 hasConcept C42360764 @default.
• W2150642007 hasConcept C44280652 @default.
• W2150642007 hasConcept C49040817 @default.
• W2150642007 hasConcept C57410435 @default.
• W2150642007 hasConcept C61696701 @default.
• W2150642007 hasConcept C64142963 @default.
• W2150642007 hasConcept C64297162 @default.
• W2150642007 hasConcept C75937256 @default.
• W2150642007 hasConcept C86803240 @default.
• W2150642007 hasConcept C97355855 @default.
• W2150642007 hasConceptScore W2150642007C121332964 @default.
• W2150642007 hasConceptScore W2150642007C127413603 @default.
• W2150642007 hasConceptScore W2150642007C133256868 @default.
• W2150642007 hasConceptScore W2150642007C151730666 @default.
• W2150642007 hasConceptScore W2150642007C171250308 @default.
• W2150642007 hasConceptScore W2150642007C178790620 @default.
• W2150642007 hasConceptScore W2150642007C183866003 @default.
• W2150642007 hasConceptScore W2150642007C185592680 @default.
• W2150642007 hasConceptScore W2150642007C19067145 @default.
• W2150642007 hasConceptScore W2150642007C192562407 @default.
• W2150642007 hasConceptScore W2150642007C2778177714 @default.
• W2150642007 hasConceptScore W2150642007C2779227376 @default.
• W2150642007 hasConceptScore W2150642007C2816523 @default.
• W2150642007 hasConceptScore W2150642007C3018640491 @default.
• W2150642007 hasConceptScore W2150642007C42360764 @default.
• W2150642007 hasConceptScore W2150642007C44280652 @default.
• W2150642007 hasConceptScore W2150642007C49040817 @default.
• W2150642007 hasConceptScore W2150642007C57410435 @default.
• W2150642007 hasConceptScore W2150642007C61696701 @default.
• W2150642007 hasConceptScore W2150642007C64142963 @default.
• W2150642007 hasConceptScore W2150642007C64297162 @default.
• W2150642007 hasConceptScore W2150642007C75937256 @default.
• W2150642007 hasConceptScore W2150642007C86803240 @default.
• W2150642007 hasConceptScore W2150642007C97355855 @default.
• W2150642007 hasIssue "9" @default.
• W2150642007 hasLocation W21506420071 @default.
• W2150642007 hasOpenAccess W2150642007 @default.
• W2150642007 hasPrimaryLocation W21506420071 @default.
• W2150642007 hasRelatedWork W1967465319 @default.

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