Matches in SemOpenAlex for { <https://semopenalex.org/work/W2150853018> ?p ?o ?g. }
- W2150853018 endingPage "254" @default.
- W2150853018 startingPage "246" @default.
- W2150853018 abstract "This paper focuses on the problem of scheduling wafer lots on diffusion workstations in a semiconductor wafer fabrication facility. In a diffusion workstation, there are multiple identical machines, and each of them can process a (limited) number of wafer lots at a time. Wafer lots can be classified into several product families, and wafer lots that belong to the same product family can be processed together as a batch. Processing times and setup times for wafer lots of the same product family are the same, but ready times of the wafer lots (at the diffusion workstation) may be different. We present several heuristic algorithms for the problem with the objective of minimizing total tardiness. For evaluation of performance of the suggested algorithms, a series of computational experiments is performed on randomly generated test problems. Results show that the suggested algorithms perform better than algorithms currently used in practice." @default.
- W2150853018 created "2016-06-24" @default.
- W2150853018 creator A5015923606 @default.
- W2150853018 creator A5058205973 @default.
- W2150853018 creator A5071157883 @default.
- W2150853018 date "2010-05-01" @default.
- W2150853018 modified "2023-10-04" @default.
- W2150853018 title "Scheduling Wafer Lots on Diffusion Machines in a Semiconductor Wafer Fabrication Facility" @default.
- W2150853018 cites W1488422606 @default.
- W2150853018 cites W1963645413 @default.
- W2150853018 cites W1966885540 @default.
- W2150853018 cites W1976300665 @default.
- W2150853018 cites W1978931881 @default.
- W2150853018 cites W2003566225 @default.
- W2150853018 cites W2004367528 @default.
- W2150853018 cites W2005665367 @default.
- W2150853018 cites W2009423917 @default.
- W2150853018 cites W2009709627 @default.
- W2150853018 cites W2014475002 @default.
- W2150853018 cites W2015365235 @default.
- W2150853018 cites W2021061788 @default.
- W2150853018 cites W2029946147 @default.
- W2150853018 cites W2045390502 @default.
- W2150853018 cites W2048631059 @default.
- W2150853018 cites W2055405237 @default.
- W2150853018 cites W2059244936 @default.
- W2150853018 cites W2068498891 @default.
- W2150853018 cites W2069703649 @default.
- W2150853018 cites W2074055219 @default.
- W2150853018 cites W2079845004 @default.
- W2150853018 cites W2086126245 @default.
- W2150853018 cites W2087973581 @default.
- W2150853018 cites W2092016688 @default.
- W2150853018 cites W2092068825 @default.
- W2150853018 cites W2097984481 @default.
- W2150853018 cites W2101851293 @default.
- W2150853018 cites W2105390489 @default.
- W2150853018 cites W2105821629 @default.
- W2150853018 cites W2106845424 @default.
- W2150853018 cites W2110066427 @default.
- W2150853018 cites W2111461061 @default.
- W2150853018 cites W2117987000 @default.
- W2150853018 cites W2119007927 @default.
- W2150853018 cites W2132273100 @default.
- W2150853018 cites W2137903142 @default.
- W2150853018 cites W2154877104 @default.
- W2150853018 cites W2159164010 @default.
- W2150853018 cites W2164239387 @default.
- W2150853018 cites W4250907990 @default.
- W2150853018 doi "https://doi.org/10.1109/tsm.2010.2045666" @default.
- W2150853018 hasPublicationYear "2010" @default.
- W2150853018 type Work @default.
- W2150853018 sameAs 2150853018 @default.
- W2150853018 citedByCount "34" @default.
- W2150853018 countsByYear W21508530182012 @default.
- W2150853018 countsByYear W21508530182013 @default.
- W2150853018 countsByYear W21508530182014 @default.
- W2150853018 countsByYear W21508530182015 @default.
- W2150853018 countsByYear W21508530182016 @default.
- W2150853018 countsByYear W21508530182017 @default.
- W2150853018 countsByYear W21508530182018 @default.
- W2150853018 countsByYear W21508530182019 @default.
- W2150853018 countsByYear W21508530182020 @default.
- W2150853018 countsByYear W21508530182021 @default.
- W2150853018 countsByYear W21508530182022 @default.
- W2150853018 countsByYear W21508530182023 @default.
- W2150853018 crossrefType "journal-article" @default.
- W2150853018 hasAuthorship W2150853018A5015923606 @default.
- W2150853018 hasAuthorship W2150853018A5058205973 @default.
- W2150853018 hasAuthorship W2150853018A5071157883 @default.
- W2150853018 hasConcept C111919701 @default.
- W2150853018 hasConcept C119599485 @default.
- W2150853018 hasConcept C127413603 @default.
- W2150853018 hasConcept C149635348 @default.
- W2150853018 hasConcept C160671074 @default.
- W2150853018 hasConcept C200601418 @default.
- W2150853018 hasConcept C206729178 @default.
- W2150853018 hasConcept C21547014 @default.
- W2150853018 hasConcept C24326235 @default.
- W2150853018 hasConcept C2778047078 @default.
- W2150853018 hasConcept C2780288131 @default.
- W2150853018 hasConcept C35750839 @default.
- W2150853018 hasConcept C41008148 @default.
- W2150853018 hasConcept C44445679 @default.
- W2150853018 hasConcept C46362747 @default.
- W2150853018 hasConcept C4775677 @default.
- W2150853018 hasConcept C55416958 @default.
- W2150853018 hasConcept C66018809 @default.
- W2150853018 hasConcept C67953723 @default.
- W2150853018 hasConcept C74172769 @default.
- W2150853018 hasConceptScore W2150853018C111919701 @default.
- W2150853018 hasConceptScore W2150853018C119599485 @default.
- W2150853018 hasConceptScore W2150853018C127413603 @default.
- W2150853018 hasConceptScore W2150853018C149635348 @default.
- W2150853018 hasConceptScore W2150853018C160671074 @default.
- W2150853018 hasConceptScore W2150853018C200601418 @default.
- W2150853018 hasConceptScore W2150853018C206729178 @default.
- W2150853018 hasConceptScore W2150853018C21547014 @default.