Matches in SemOpenAlex for { <https://semopenalex.org/work/W2150871773> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W2150871773 abstract "Electrochemical C-V (EC-V) profiling is the most often used and convenient method for accurate majority carrier concentration depth profiling of semiconductors. None of the previously developed electrolytes recommended for EC-V profiling of InP and GaAs based structures works with all the materials encountered. In our experience, the most common problems encountered when using these electrolytes are: (i) a poor electrolyte/semiconductor Mott-Schottky barrier, (ii) preferential dissolution at the defect areas, (iii) high chemical etch rates, (iv) formation of insoluble products on the surface, (v) large parasitic capacitance components, (vi) a rough bottom of the etch crater, (vii) rounding at the crater rim and (viii) electrolyte seeping under the edge of the sealing rim. Although, according to us, FAP is the best electrolyte for accurate profiling of InP structures, it does not work well with other III-V compounds. To overcome this, recently, we have developed a new electrolyte, which we call UNIEL (UNIversal ELectrolyte). However, as with the FAP electrolyte, the presence of HF makes the UNIEL incompatible with the electrochemical cell of Polaron EC-V profilers manufactured by BIG-RAD. By slightly modifying the electrochemical cell configuration we are able to use both the FAP and UNIEL electrolytes, without destroying the calomel electrode. Recently, we have, nevertheless, experimented with variations of the UNIEL with no HF content for EC-V profiling of structures based on InP and GaAs. Presently available results are presented here." @default.
- W2150871773 created "2016-06-24" @default.
- W2150871773 creator A5013191398 @default.
- W2150871773 creator A5029945985 @default.
- W2150871773 creator A5090480106 @default.
- W2150871773 creator A5090568216 @default.
- W2150871773 date "1996-01-01" @default.
- W2150871773 modified "2023-10-01" @default.
- W2150871773 title "Electrolyte for EC-V profiling of InP and GaAs based structures" @default.
- W2150871773 cites W2006708112 @default.
- W2150871773 cites W2009251271 @default.
- W2150871773 cites W2022159484 @default.
- W2150871773 cites W2034534868 @default.
- W2150871773 cites W2047461309 @default.
- W2150871773 doi "https://doi.org/10.1109/iciprm.1996.492328" @default.
- W2150871773 hasPublicationYear "1996" @default.
- W2150871773 type Work @default.
- W2150871773 sameAs 2150871773 @default.
- W2150871773 citedByCount "3" @default.
- W2150871773 countsByYear W21508717732023 @default.
- W2150871773 crossrefType "proceedings-article" @default.
- W2150871773 hasAuthorship W2150871773A5013191398 @default.
- W2150871773 hasAuthorship W2150871773A5029945985 @default.
- W2150871773 hasAuthorship W2150871773A5090480106 @default.
- W2150871773 hasAuthorship W2150871773A5090568216 @default.
- W2150871773 hasConcept C108225325 @default.
- W2150871773 hasConcept C113196181 @default.
- W2150871773 hasConcept C147789679 @default.
- W2150871773 hasConcept C17525397 @default.
- W2150871773 hasConcept C185592680 @default.
- W2150871773 hasConcept C192562407 @default.
- W2150871773 hasConcept C43617362 @default.
- W2150871773 hasConcept C49040817 @default.
- W2150871773 hasConcept C52859227 @default.
- W2150871773 hasConcept C68801617 @default.
- W2150871773 hasConceptScore W2150871773C108225325 @default.
- W2150871773 hasConceptScore W2150871773C113196181 @default.
- W2150871773 hasConceptScore W2150871773C147789679 @default.
- W2150871773 hasConceptScore W2150871773C17525397 @default.
- W2150871773 hasConceptScore W2150871773C185592680 @default.
- W2150871773 hasConceptScore W2150871773C192562407 @default.
- W2150871773 hasConceptScore W2150871773C43617362 @default.
- W2150871773 hasConceptScore W2150871773C49040817 @default.
- W2150871773 hasConceptScore W2150871773C52859227 @default.
- W2150871773 hasConceptScore W2150871773C68801617 @default.
- W2150871773 hasLocation W21508717731 @default.
- W2150871773 hasOpenAccess W2150871773 @default.
- W2150871773 hasPrimaryLocation W21508717731 @default.
- W2150871773 hasRelatedWork W1987674700 @default.
- W2150871773 hasRelatedWork W2027279228 @default.
- W2150871773 hasRelatedWork W2044740642 @default.
- W2150871773 hasRelatedWork W2159779271 @default.
- W2150871773 hasRelatedWork W2335008604 @default.
- W2150871773 hasRelatedWork W2406618687 @default.
- W2150871773 hasRelatedWork W2899084033 @default.
- W2150871773 hasRelatedWork W2953250471 @default.
- W2150871773 hasRelatedWork W3137452781 @default.
- W2150871773 hasRelatedWork W780397172 @default.
- W2150871773 isParatext "false" @default.
- W2150871773 isRetracted "false" @default.
- W2150871773 magId "2150871773" @default.
- W2150871773 workType "article" @default.