Matches in SemOpenAlex for { <https://semopenalex.org/work/W2151036706> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2151036706 abstract "This paper presents an adaptive control approach for achieving the control of the wafer temperature in a rapid thermal processing system (RTP). Numerous studies have addressed the temperature control problem in RTP and most researches on this problem require exact knowledge of the systems dynamics. However, it is difficult to acquire this exact knowledge. Thus, various approaches cannot guarantee the desired performance in practical application when there exist some modeling errors between the model and the actual system. In this paper, an adaptive control scheme is applied to RTP without exact information on the dynamics. The system dynamics are assumed to be an affine nonlinear form, and the unknown portion of the dynamics are estimated by a neural network referred to a piecewise linear approximation network (PLAN). The controller architecture is based on an adaptive feedback linearization scheme and augmented by sliding mode control. The performance of the proposed method is demonstrated by experimental results on an RTP system of Kornic Systems Corporation, Korea." @default.
- W2151036706 created "2016-06-24" @default.
- W2151036706 creator A5010381151 @default.
- W2151036706 creator A5029832903 @default.
- W2151036706 creator A5088891890 @default.
- W2151036706 date "2003-11-01" @default.
- W2151036706 modified "2023-09-27" @default.
- W2151036706 title "Adaptive control approach of rapid thermal processing" @default.
- W2151036706 cites W2032607604 @default.
- W2151036706 cites W2054761727 @default.
- W2151036706 cites W2073784397 @default.
- W2151036706 cites W2109613505 @default.
- W2151036706 cites W2110170047 @default.
- W2151036706 cites W2127712435 @default.
- W2151036706 cites W2133298645 @default.
- W2151036706 cites W2139848811 @default.
- W2151036706 cites W2164926154 @default.
- W2151036706 cites W2165195755 @default.
- W2151036706 doi "https://doi.org/10.1109/tsm.2003.818961" @default.
- W2151036706 hasPublicationYear "2003" @default.
- W2151036706 type Work @default.
- W2151036706 sameAs 2151036706 @default.
- W2151036706 citedByCount "20" @default.
- W2151036706 countsByYear W21510367062013 @default.
- W2151036706 countsByYear W21510367062016 @default.
- W2151036706 countsByYear W21510367062017 @default.
- W2151036706 countsByYear W21510367062018 @default.
- W2151036706 countsByYear W21510367062019 @default.
- W2151036706 countsByYear W21510367062021 @default.
- W2151036706 crossrefType "journal-article" @default.
- W2151036706 hasAuthorship W2151036706A5010381151 @default.
- W2151036706 hasAuthorship W2151036706A5029832903 @default.
- W2151036706 hasAuthorship W2151036706A5088891890 @default.
- W2151036706 hasConcept C107464732 @default.
- W2151036706 hasConcept C11210021 @default.
- W2151036706 hasConcept C119599485 @default.
- W2151036706 hasConcept C121332964 @default.
- W2151036706 hasConcept C127413603 @default.
- W2151036706 hasConcept C133731056 @default.
- W2151036706 hasConcept C134306372 @default.
- W2151036706 hasConcept C154945302 @default.
- W2151036706 hasConcept C158622935 @default.
- W2151036706 hasConcept C160671074 @default.
- W2151036706 hasConcept C17500928 @default.
- W2151036706 hasConcept C203479927 @default.
- W2151036706 hasConcept C2775924081 @default.
- W2151036706 hasConcept C33923547 @default.
- W2151036706 hasConcept C41008148 @default.
- W2151036706 hasConcept C47446073 @default.
- W2151036706 hasConcept C50644808 @default.
- W2151036706 hasConcept C536315585 @default.
- W2151036706 hasConcept C62520636 @default.
- W2151036706 hasConcept C6557445 @default.
- W2151036706 hasConcept C72832162 @default.
- W2151036706 hasConcept C77405623 @default.
- W2151036706 hasConcept C77618280 @default.
- W2151036706 hasConcept C85736874 @default.
- W2151036706 hasConcept C86803240 @default.
- W2151036706 hasConceptScore W2151036706C107464732 @default.
- W2151036706 hasConceptScore W2151036706C11210021 @default.
- W2151036706 hasConceptScore W2151036706C119599485 @default.
- W2151036706 hasConceptScore W2151036706C121332964 @default.
- W2151036706 hasConceptScore W2151036706C127413603 @default.
- W2151036706 hasConceptScore W2151036706C133731056 @default.
- W2151036706 hasConceptScore W2151036706C134306372 @default.
- W2151036706 hasConceptScore W2151036706C154945302 @default.
- W2151036706 hasConceptScore W2151036706C158622935 @default.
- W2151036706 hasConceptScore W2151036706C160671074 @default.
- W2151036706 hasConceptScore W2151036706C17500928 @default.
- W2151036706 hasConceptScore W2151036706C203479927 @default.
- W2151036706 hasConceptScore W2151036706C2775924081 @default.
- W2151036706 hasConceptScore W2151036706C33923547 @default.
- W2151036706 hasConceptScore W2151036706C41008148 @default.
- W2151036706 hasConceptScore W2151036706C47446073 @default.
- W2151036706 hasConceptScore W2151036706C50644808 @default.
- W2151036706 hasConceptScore W2151036706C536315585 @default.
- W2151036706 hasConceptScore W2151036706C62520636 @default.
- W2151036706 hasConceptScore W2151036706C6557445 @default.
- W2151036706 hasConceptScore W2151036706C72832162 @default.
- W2151036706 hasConceptScore W2151036706C77405623 @default.
- W2151036706 hasConceptScore W2151036706C77618280 @default.
- W2151036706 hasConceptScore W2151036706C85736874 @default.
- W2151036706 hasConceptScore W2151036706C86803240 @default.
- W2151036706 hasLocation W21510367061 @default.
- W2151036706 hasOpenAccess W2151036706 @default.
- W2151036706 hasPrimaryLocation W21510367061 @default.
- W2151036706 hasRelatedWork W145316617 @default.
- W2151036706 hasRelatedWork W1577928039 @default.
- W2151036706 hasRelatedWork W2099015086 @default.
- W2151036706 hasRelatedWork W2107122120 @default.
- W2151036706 hasRelatedWork W2391281852 @default.
- W2151036706 hasRelatedWork W2542003076 @default.
- W2151036706 hasRelatedWork W2614171570 @default.
- W2151036706 hasRelatedWork W2969358681 @default.
- W2151036706 hasRelatedWork W32590331 @default.
- W2151036706 hasRelatedWork W633801999 @default.
- W2151036706 isParatext "false" @default.
- W2151036706 isRetracted "false" @default.
- W2151036706 magId "2151036706" @default.
- W2151036706 workType "article" @default.