Matches in SemOpenAlex for { <https://semopenalex.org/work/W2151109552> ?p ?o ?g. }
Showing items 1 to 63 of
63
with 100 items per page.
- W2151109552 abstract "A microactuator technology utilizing magnetic thin films and polysilicon flexures is applied to torsional micro structures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 x 130 x l5 /spl mu/m/sup 3/ nickel-iron plate attached to a pair of 400 x 2.2 x 2.2 /spl mu/m/sup 3/ polysilicon torsional beams has been rotated more than 90/spl deg/ out of the plane of the wafer and actuated with a torque greater than 3.0 nN-m. The torsional flexure structure constrains motion to rotation about a single axis which can be an advantage for a number of microphotonic applications (e.g., beam chopping, scanning, and steering)." @default.
- W2151109552 created "2016-06-24" @default.
- W2151109552 creator A5065082992 @default.
- W2151109552 creator A5073987024 @default.
- W2151109552 date "2005-08-24" @default.
- W2151109552 modified "2023-10-14" @default.
- W2151109552 title "Magnetic Microactuation Of Torsional Polysilicon Structures" @default.
- W2151109552 cites W1996370321 @default.
- W2151109552 cites W2014467377 @default.
- W2151109552 cites W2020077517 @default.
- W2151109552 cites W2115569844 @default.
- W2151109552 cites W2116627944 @default.
- W2151109552 cites W2129313514 @default.
- W2151109552 cites W2164679795 @default.
- W2151109552 doi "https://doi.org/10.1109/sensor.1995.717186" @default.
- W2151109552 hasPublicationYear "2005" @default.
- W2151109552 type Work @default.
- W2151109552 sameAs 2151109552 @default.
- W2151109552 citedByCount "17" @default.
- W2151109552 countsByYear W21511095522013 @default.
- W2151109552 countsByYear W21511095522018 @default.
- W2151109552 crossrefType "proceedings-article" @default.
- W2151109552 hasAuthorship W2151109552A5065082992 @default.
- W2151109552 hasAuthorship W2151109552A5073987024 @default.
- W2151109552 hasConcept C119599485 @default.
- W2151109552 hasConcept C121332964 @default.
- W2151109552 hasConcept C127413603 @default.
- W2151109552 hasConcept C165801399 @default.
- W2151109552 hasConcept C172385210 @default.
- W2151109552 hasConcept C192562407 @default.
- W2151109552 hasConcept C2361726 @default.
- W2151109552 hasConcept C25356406 @default.
- W2151109552 hasConcept C41008148 @default.
- W2151109552 hasConcept C49040817 @default.
- W2151109552 hasConcept C61696701 @default.
- W2151109552 hasConceptScore W2151109552C119599485 @default.
- W2151109552 hasConceptScore W2151109552C121332964 @default.
- W2151109552 hasConceptScore W2151109552C127413603 @default.
- W2151109552 hasConceptScore W2151109552C165801399 @default.
- W2151109552 hasConceptScore W2151109552C172385210 @default.
- W2151109552 hasConceptScore W2151109552C192562407 @default.
- W2151109552 hasConceptScore W2151109552C2361726 @default.
- W2151109552 hasConceptScore W2151109552C25356406 @default.
- W2151109552 hasConceptScore W2151109552C41008148 @default.
- W2151109552 hasConceptScore W2151109552C49040817 @default.
- W2151109552 hasConceptScore W2151109552C61696701 @default.
- W2151109552 hasLocation W21511095521 @default.
- W2151109552 hasOpenAccess W2151109552 @default.
- W2151109552 hasPrimaryLocation W21511095521 @default.
- W2151109552 hasRelatedWork W2121524308 @default.
- W2151109552 hasRelatedWork W2139871202 @default.
- W2151109552 hasRelatedWork W2292675962 @default.
- W2151109552 hasRelatedWork W2399397734 @default.
- W2151109552 hasRelatedWork W2460230608 @default.
- W2151109552 hasRelatedWork W2748952813 @default.
- W2151109552 hasRelatedWork W2769410768 @default.
- W2151109552 hasRelatedWork W2899084033 @default.
- W2151109552 hasRelatedWork W2902546961 @default.
- W2151109552 hasRelatedWork W3127524829 @default.
- W2151109552 isParatext "false" @default.
- W2151109552 isRetracted "false" @default.
- W2151109552 magId "2151109552" @default.
- W2151109552 workType "article" @default.