Matches in SemOpenAlex for { <https://semopenalex.org/work/W2151287082> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2151287082 endingPage "883" @default.
- W2151287082 startingPage "879" @default.
- W2151287082 abstract "An algorithm for smoothing results of three-dimensional (3-D) Monte Carlo ion implantation simulations and translating them from the grid used for the Monte Carlo simulation to an arbitrary unstructured 3-D grid is presented. This algorithm is important for joining various process simulation steps, where data have to be smoothed or transferred from one grid to another. Furthermore, it is important for integrating the ion implantation simulator into a process flow. One reason for using different grids is that for certain Monte Carlo simulation methods, using orthogrids is mandatory because of performance reasons. The algorithm presented sweeps a small rectangular grid over the points of the new tetrahedral grid and uses approximation by generalized Bernstein polynomials. This approach was put on a mathematically sound basis by proving several properties of these polynomials. It does not suffer from the adverse effects of least squares fits of polynomials of fixed degree as known from the response surface method. The most important properties of Bernstein polynomials generalized to cuboid domains are presented, including uniform convergence, an asymptotic formula, and the variation diminishing property. The smoothing algorithm which works very fast is described and, in order to show its applicability, the resulting values of a 3-D real world implantation example are given and compared with those of a least squares fit of a multivariate polynomial of degree two, which yielded unusable results." @default.
- W2151287082 created "2016-06-24" @default.
- W2151287082 creator A5037749602 @default.
- W2151287082 creator A5043510129 @default.
- W2151287082 creator A5072452255 @default.
- W2151287082 date "2003-07-01" @default.
- W2151287082 modified "2023-09-25" @default.
- W2151287082 title "On smoothing three-dimensional monte carlo ion implantation simulation results" @default.
- W2151287082 cites W131926872 @default.
- W2151287082 cites W184083075 @default.
- W2151287082 cites W1870755151 @default.
- W2151287082 cites W1874568913 @default.
- W2151287082 cites W1964521076 @default.
- W2151287082 cites W2002056420 @default.
- W2151287082 cites W2023956920 @default.
- W2151287082 cites W2031174155 @default.
- W2151287082 cites W2052318484 @default.
- W2151287082 cites W2120721107 @default.
- W2151287082 cites W2140361187 @default.
- W2151287082 cites W2141292846 @default.
- W2151287082 cites W2142186877 @default.
- W2151287082 cites W2159396467 @default.
- W2151287082 cites W4205438380 @default.
- W2151287082 doi "https://doi.org/10.1109/tcad.2003.814259" @default.
- W2151287082 hasPublicationYear "2003" @default.
- W2151287082 type Work @default.
- W2151287082 sameAs 2151287082 @default.
- W2151287082 citedByCount "2" @default.
- W2151287082 countsByYear W21512870822015 @default.
- W2151287082 countsByYear W21512870822018 @default.
- W2151287082 crossrefType "journal-article" @default.
- W2151287082 hasAuthorship W2151287082A5037749602 @default.
- W2151287082 hasAuthorship W2151287082A5043510129 @default.
- W2151287082 hasAuthorship W2151287082A5072452255 @default.
- W2151287082 hasConcept C105795698 @default.
- W2151287082 hasConcept C11413529 @default.
- W2151287082 hasConcept C126255220 @default.
- W2151287082 hasConcept C134306372 @default.
- W2151287082 hasConcept C162324750 @default.
- W2151287082 hasConcept C187691185 @default.
- W2151287082 hasConcept C19499675 @default.
- W2151287082 hasConcept C2524010 @default.
- W2151287082 hasConcept C2777303404 @default.
- W2151287082 hasConcept C28826006 @default.
- W2151287082 hasConcept C33923547 @default.
- W2151287082 hasConcept C3770464 @default.
- W2151287082 hasConcept C41008148 @default.
- W2151287082 hasConcept C50522688 @default.
- W2151287082 hasConcept C90119067 @default.
- W2151287082 hasConceptScore W2151287082C105795698 @default.
- W2151287082 hasConceptScore W2151287082C11413529 @default.
- W2151287082 hasConceptScore W2151287082C126255220 @default.
- W2151287082 hasConceptScore W2151287082C134306372 @default.
- W2151287082 hasConceptScore W2151287082C162324750 @default.
- W2151287082 hasConceptScore W2151287082C187691185 @default.
- W2151287082 hasConceptScore W2151287082C19499675 @default.
- W2151287082 hasConceptScore W2151287082C2524010 @default.
- W2151287082 hasConceptScore W2151287082C2777303404 @default.
- W2151287082 hasConceptScore W2151287082C28826006 @default.
- W2151287082 hasConceptScore W2151287082C33923547 @default.
- W2151287082 hasConceptScore W2151287082C3770464 @default.
- W2151287082 hasConceptScore W2151287082C41008148 @default.
- W2151287082 hasConceptScore W2151287082C50522688 @default.
- W2151287082 hasConceptScore W2151287082C90119067 @default.
- W2151287082 hasIssue "7" @default.
- W2151287082 hasLocation W21512870821 @default.
- W2151287082 hasOpenAccess W2151287082 @default.
- W2151287082 hasPrimaryLocation W21512870821 @default.
- W2151287082 hasRelatedWork W113723831 @default.
- W2151287082 hasRelatedWork W1622663103 @default.
- W2151287082 hasRelatedWork W1642175743 @default.
- W2151287082 hasRelatedWork W1873780544 @default.
- W2151287082 hasRelatedWork W2068075124 @default.
- W2151287082 hasRelatedWork W2077192697 @default.
- W2151287082 hasRelatedWork W2078088455 @default.
- W2151287082 hasRelatedWork W2620661725 @default.
- W2151287082 hasRelatedWork W2980851932 @default.
- W2151287082 hasRelatedWork W3081773406 @default.
- W2151287082 hasVolume "22" @default.
- W2151287082 isParatext "false" @default.
- W2151287082 isRetracted "false" @default.
- W2151287082 magId "2151287082" @default.
- W2151287082 workType "article" @default.