Matches in SemOpenAlex for { <https://semopenalex.org/work/W2151337864> ?p ?o ?g. }
- W2151337864 endingPage "57" @default.
- W2151337864 startingPage "55" @default.
- W2151337864 abstract "Abstract In many areas of research a need for single small holes with diameters from a few nm to several μm and large aspect ratios exists that is hard to meet with existing technologies. In a proof of principle it is shown that suitable single holes or specific arrays of some single holes can be made by first etching a very large number of small and deep holes or pores into semiconductors like Si or InP by established electrochemical means, followed by masking the desired holes and filling all others with, e.g., a metal in a galvanic process. The potential and limitations of this technique is briefly discussed. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2151337864 created "2016-06-24" @default.
- W2151337864 creator A5008966050 @default.
- W2151337864 creator A5032790211 @default.
- W2151337864 creator A5035040860 @default.
- W2151337864 creator A5036507469 @default.
- W2151337864 creator A5039921712 @default.
- W2151337864 creator A5076961783 @default.
- W2151337864 date "2009-03-01" @default.
- W2151337864 modified "2023-09-27" @default.
- W2151337864 title "How to make single small holes with large aspect ratios" @default.
- W2151337864 cites W1518293840 @default.
- W2151337864 cites W1606920356 @default.
- W2151337864 cites W1965868154 @default.
- W2151337864 cites W1981116022 @default.
- W2151337864 cites W1986225230 @default.
- W2151337864 cites W1993485759 @default.
- W2151337864 cites W1999184196 @default.
- W2151337864 cites W2024441578 @default.
- W2151337864 cites W2028086638 @default.
- W2151337864 cites W2028559507 @default.
- W2151337864 cites W2029146138 @default.
- W2151337864 cites W2033849221 @default.
- W2151337864 cites W2045921756 @default.
- W2151337864 cites W2066840883 @default.
- W2151337864 cites W2088993910 @default.
- W2151337864 cites W2090402962 @default.
- W2151337864 cites W2095898308 @default.
- W2151337864 cites W2117517445 @default.
- W2151337864 cites W2118690127 @default.
- W2151337864 cites W2131716718 @default.
- W2151337864 cites W2140502581 @default.
- W2151337864 cites W2169502255 @default.
- W2151337864 cites W2496933069 @default.
- W2151337864 cites W259396729 @default.
- W2151337864 cites W271902226 @default.
- W2151337864 cites W55988408 @default.
- W2151337864 doi "https://doi.org/10.1002/pssr.200802257" @default.
- W2151337864 hasPublicationYear "2009" @default.
- W2151337864 type Work @default.
- W2151337864 sameAs 2151337864 @default.
- W2151337864 citedByCount "3" @default.
- W2151337864 countsByYear W21513378642012 @default.
- W2151337864 countsByYear W21513378642013 @default.
- W2151337864 crossrefType "journal-article" @default.
- W2151337864 hasAuthorship W2151337864A5008966050 @default.
- W2151337864 hasAuthorship W2151337864A5032790211 @default.
- W2151337864 hasAuthorship W2151337864A5035040860 @default.
- W2151337864 hasAuthorship W2151337864A5036507469 @default.
- W2151337864 hasAuthorship W2151337864A5039921712 @default.
- W2151337864 hasAuthorship W2151337864A5076961783 @default.
- W2151337864 hasConcept C100460472 @default.
- W2151337864 hasConcept C108225325 @default.
- W2151337864 hasConcept C111919701 @default.
- W2151337864 hasConcept C121332964 @default.
- W2151337864 hasConcept C124978682 @default.
- W2151337864 hasConcept C142362112 @default.
- W2151337864 hasConcept C153349607 @default.
- W2151337864 hasConcept C171250308 @default.
- W2151337864 hasConcept C191897082 @default.
- W2151337864 hasConcept C192562407 @default.
- W2151337864 hasConcept C2777402240 @default.
- W2151337864 hasConcept C2779227376 @default.
- W2151337864 hasConcept C29633239 @default.
- W2151337864 hasConcept C41008148 @default.
- W2151337864 hasConcept C49040817 @default.
- W2151337864 hasConcept C61696701 @default.
- W2151337864 hasConcept C82558694 @default.
- W2151337864 hasConcept C98045186 @default.
- W2151337864 hasConceptScore W2151337864C100460472 @default.
- W2151337864 hasConceptScore W2151337864C108225325 @default.
- W2151337864 hasConceptScore W2151337864C111919701 @default.
- W2151337864 hasConceptScore W2151337864C121332964 @default.
- W2151337864 hasConceptScore W2151337864C124978682 @default.
- W2151337864 hasConceptScore W2151337864C142362112 @default.
- W2151337864 hasConceptScore W2151337864C153349607 @default.
- W2151337864 hasConceptScore W2151337864C171250308 @default.
- W2151337864 hasConceptScore W2151337864C191897082 @default.
- W2151337864 hasConceptScore W2151337864C192562407 @default.
- W2151337864 hasConceptScore W2151337864C2777402240 @default.
- W2151337864 hasConceptScore W2151337864C2779227376 @default.
- W2151337864 hasConceptScore W2151337864C29633239 @default.
- W2151337864 hasConceptScore W2151337864C41008148 @default.
- W2151337864 hasConceptScore W2151337864C49040817 @default.
- W2151337864 hasConceptScore W2151337864C61696701 @default.
- W2151337864 hasConceptScore W2151337864C82558694 @default.
- W2151337864 hasConceptScore W2151337864C98045186 @default.
- W2151337864 hasIssue "2-3" @default.
- W2151337864 hasLocation W21513378641 @default.
- W2151337864 hasOpenAccess W2151337864 @default.
- W2151337864 hasPrimaryLocation W21513378641 @default.
- W2151337864 hasRelatedWork W1984699389 @default.
- W2151337864 hasRelatedWork W2052439531 @default.
- W2151337864 hasRelatedWork W2052672479 @default.
- W2151337864 hasRelatedWork W2090673143 @default.
- W2151337864 hasRelatedWork W2095397242 @default.
- W2151337864 hasRelatedWork W2151337864 @default.
- W2151337864 hasRelatedWork W2153406041 @default.