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- W2151610565 abstract "Plasma etching removes material from a silicon wafer by applying power and gases in a chamber. As material is removed from a wafer, the amount of particular chemicals given off can be measured; this technique is called emission spectroscopy and the measurements are called endpoint traces. An expert system that automatically interprets the traces has been designed and built. The system combines signal-to-symbol transformations for data abstraction and rule-based reasoning for diagnosis. The system detects problems as soon as they occur and also determines their causes.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2151610565 date "1988-02-01" @default.
- W2151610565 modified "2023-10-04" @default.
- W2151610565 title "Monitoring and diagnosis of plasma etch processes" @default.
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- W2151610565 doi "https://doi.org/10.1109/66.4369" @default.
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