Matches in SemOpenAlex for { <https://semopenalex.org/work/W2151738761> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2151738761 abstract "Summary form only given. Thermal plasma processes are frequently accompanied with large energy consumption and environmental pollution. Optimum design and operation conditions help to reduce these concomitants and the production costs. Such an optimization can be considerably supported by modeling. An inductively coupled plasma torch for the silicon oxide deposition as it is typically applied for fiber preform production is studied by simulations. The analysis focuses on the induction process, the flow and plasma properties as well as the deposition process. A burner made by three cylindrical quartz tubes and a copper coil with five turns operated with 25 kW RF power at 3 MHz is considered. Oxygen (30 slm) and Nitrogen (120 slm) are used as plasma and sheath gas, respectively, at atmospheric pressure. For the outside vapor deposition process the precursor SiCl4 (2 kg/h) is fed through a nozzle in the torch center below the heating zone. The cylindrical preform target rotates (1 s1) and laterally moves (0.18 m/min) in a distance of 4.2 cm above the burner. A 3D MHD-simulation method has been developed for the torch plasma based on the CFD-ACE+ commercial package. The steady state continuity, momentum and enthalpy equations are solved assuming local thermal and chemical equilibrium and laminar flow. This system is coupled with the electromagnetic equations to describe the induction process self-consistently. For all species considered in the system a transport equation is solved. The surface reaction governing the deposition process provides a boundary condition for the species mass fractions in the fluid.The simulation provides inside into the realistic spatial behavior of temperature, flow and mixing of the species. The calculated deposition rate on the substrate is illustrated in Fig. 1. In addition, the deposition on critical parts of the burner has been studied. The simulation method developed is suitable for burner design optimization as well as for deducing improved operation conditions." @default.
- W2151738761 created "2016-06-24" @default.
- W2151738761 creator A5021793747 @default.
- W2151738761 creator A5041927416 @default.
- W2151738761 creator A5078229000 @default.
- W2151738761 date "2009-06-01" @default.
- W2151738761 modified "2023-09-27" @default.
- W2151738761 title "Investigation of an ICP torch plasma for the SiO<inf>2</inf> deposition utilizing 3D MHD-simulations" @default.
- W2151738761 doi "https://doi.org/10.1109/plasma.2009.5227761" @default.
- W2151738761 hasPublicationYear "2009" @default.
- W2151738761 type Work @default.
- W2151738761 sameAs 2151738761 @default.
- W2151738761 citedByCount "1" @default.
- W2151738761 countsByYear W21517387612021 @default.
- W2151738761 crossrefType "proceedings-article" @default.
- W2151738761 hasAuthorship W2151738761A5021793747 @default.
- W2151738761 hasAuthorship W2151738761A5041927416 @default.
- W2151738761 hasAuthorship W2151738761A5078229000 @default.
- W2151738761 hasConcept C116915560 @default.
- W2151738761 hasConcept C119599485 @default.
- W2151738761 hasConcept C121332964 @default.
- W2151738761 hasConcept C127313418 @default.
- W2151738761 hasConcept C127413603 @default.
- W2151738761 hasConcept C139719470 @default.
- W2151738761 hasConcept C151730666 @default.
- W2151738761 hasConcept C162324750 @default.
- W2151738761 hasConcept C1700975 @default.
- W2151738761 hasConcept C191897082 @default.
- W2151738761 hasConcept C192562407 @default.
- W2151738761 hasConcept C19474535 @default.
- W2151738761 hasConcept C204530211 @default.
- W2151738761 hasConcept C21880701 @default.
- W2151738761 hasConcept C2778348673 @default.
- W2151738761 hasConcept C2780165032 @default.
- W2151738761 hasConcept C2816523 @default.
- W2151738761 hasConcept C2909468537 @default.
- W2151738761 hasConcept C31532427 @default.
- W2151738761 hasConcept C39432304 @default.
- W2151738761 hasConcept C41008148 @default.
- W2151738761 hasConcept C526734887 @default.
- W2151738761 hasConcept C62520636 @default.
- W2151738761 hasConcept C64297162 @default.
- W2151738761 hasConcept C82706917 @default.
- W2151738761 hasConcept C946207 @default.
- W2151738761 hasConcept C97355855 @default.
- W2151738761 hasConceptScore W2151738761C116915560 @default.
- W2151738761 hasConceptScore W2151738761C119599485 @default.
- W2151738761 hasConceptScore W2151738761C121332964 @default.
- W2151738761 hasConceptScore W2151738761C127313418 @default.
- W2151738761 hasConceptScore W2151738761C127413603 @default.
- W2151738761 hasConceptScore W2151738761C139719470 @default.
- W2151738761 hasConceptScore W2151738761C151730666 @default.
- W2151738761 hasConceptScore W2151738761C162324750 @default.
- W2151738761 hasConceptScore W2151738761C1700975 @default.
- W2151738761 hasConceptScore W2151738761C191897082 @default.
- W2151738761 hasConceptScore W2151738761C192562407 @default.
- W2151738761 hasConceptScore W2151738761C19474535 @default.
- W2151738761 hasConceptScore W2151738761C204530211 @default.
- W2151738761 hasConceptScore W2151738761C21880701 @default.
- W2151738761 hasConceptScore W2151738761C2778348673 @default.
- W2151738761 hasConceptScore W2151738761C2780165032 @default.
- W2151738761 hasConceptScore W2151738761C2816523 @default.
- W2151738761 hasConceptScore W2151738761C2909468537 @default.
- W2151738761 hasConceptScore W2151738761C31532427 @default.
- W2151738761 hasConceptScore W2151738761C39432304 @default.
- W2151738761 hasConceptScore W2151738761C41008148 @default.
- W2151738761 hasConceptScore W2151738761C526734887 @default.
- W2151738761 hasConceptScore W2151738761C62520636 @default.
- W2151738761 hasConceptScore W2151738761C64297162 @default.
- W2151738761 hasConceptScore W2151738761C82706917 @default.
- W2151738761 hasConceptScore W2151738761C946207 @default.
- W2151738761 hasConceptScore W2151738761C97355855 @default.
- W2151738761 hasLocation W21517387611 @default.
- W2151738761 hasOpenAccess W2151738761 @default.
- W2151738761 hasPrimaryLocation W21517387611 @default.
- W2151738761 hasRelatedWork W153301451 @default.
- W2151738761 hasRelatedWork W1534774233 @default.
- W2151738761 hasRelatedWork W1964562179 @default.
- W2151738761 hasRelatedWork W2007543354 @default.
- W2151738761 hasRelatedWork W2028666299 @default.
- W2151738761 hasRelatedWork W2070949846 @default.
- W2151738761 hasRelatedWork W2080693462 @default.
- W2151738761 hasRelatedWork W2258577174 @default.
- W2151738761 hasRelatedWork W2327483985 @default.
- W2151738761 hasRelatedWork W2331974754 @default.
- W2151738761 hasRelatedWork W2529173175 @default.
- W2151738761 hasRelatedWork W2553548716 @default.
- W2151738761 hasRelatedWork W2565304710 @default.
- W2151738761 hasRelatedWork W2619265827 @default.
- W2151738761 hasRelatedWork W2767248929 @default.
- W2151738761 hasRelatedWork W2945068310 @default.
- W2151738761 hasRelatedWork W2945710438 @default.
- W2151738761 hasRelatedWork W3049343098 @default.
- W2151738761 hasRelatedWork W3162765932 @default.
- W2151738761 hasRelatedWork W2861717617 @default.
- W2151738761 isParatext "false" @default.
- W2151738761 isRetracted "false" @default.
- W2151738761 magId "2151738761" @default.
- W2151738761 workType "article" @default.