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• W2151970810 abstract "A multistate latching variable optical attenuator (VOA) is demonstrated using microelectromechanical systems (MEMS) technology. The mechanism is used to fix the position of a shutter inserted into the optical path between two single-mode fibers. The mechanism and fiber mounts are fabricated in 85 μm thick silicon using bonded silicon-on-insulator material, by deep reactive ion etching. The device can be continuously adjusted or latched into a discrete set of attenuation states using a rack-and-tooth mechanism driven by electrothermal shape bimorph actuators. Electromechanical and optical characterization is performed to demonstrate a latching VOA function, with a maximum attenuation of 30 dB." @default.
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• W2151970810 date "2004-01-01" @default.
• W2151970810 modified "2023-09-27" @default.
• W2151970810 title "Multistate Latching MEMS Variable Optical Attenuator" @default.
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• W2151970810 doi "https://doi.org/10.1109/lpt.2003.820476" @default.
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