Matches in SemOpenAlex for { <https://semopenalex.org/work/W2152020129> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2152020129 abstract "In this work, we investigate polysilicon capacitor oxide defectivity as a function of dopant contamination in a 0.5 /spl mu/m mixed signal process. Experiments show that shallow n and p type dopant implants, used to mimic a cross contamination problem discovered in a PECVD cluster tool, can significantly degrade oxide integrity. Various possible mechanisms of the increased defectivity are discussed." @default.
- W2152020129 created "2016-06-24" @default.
- W2152020129 creator A5060423319 @default.
- W2152020129 creator A5090973597 @default.
- W2152020129 date "2005-04-25" @default.
- W2152020129 modified "2023-09-24" @default.
- W2152020129 title "Dopant influence on polysilicon capacitor oxide failure" @default.
- W2152020129 cites W2003308838 @default.
- W2152020129 cites W2103759916 @default.
- W2152020129 cites W2114949513 @default.
- W2152020129 cites W2119106602 @default.
- W2152020129 doi "https://doi.org/10.1109/irws.2004.1422759" @default.
- W2152020129 hasPublicationYear "2005" @default.
- W2152020129 type Work @default.
- W2152020129 sameAs 2152020129 @default.
- W2152020129 citedByCount "0" @default.
- W2152020129 crossrefType "proceedings-article" @default.
- W2152020129 hasAuthorship W2152020129A5060423319 @default.
- W2152020129 hasAuthorship W2152020129A5090973597 @default.
- W2152020129 hasConcept C119599485 @default.
- W2152020129 hasConcept C127413603 @default.
- W2152020129 hasConcept C165801399 @default.
- W2152020129 hasConcept C191897082 @default.
- W2152020129 hasConcept C191952053 @default.
- W2152020129 hasConcept C192562407 @default.
- W2152020129 hasConcept C24326235 @default.
- W2152020129 hasConcept C2779851234 @default.
- W2152020129 hasConcept C38347018 @default.
- W2152020129 hasConcept C49040817 @default.
- W2152020129 hasConcept C52192207 @default.
- W2152020129 hasConcept C544956773 @default.
- W2152020129 hasConcept C57863236 @default.
- W2152020129 hasConceptScore W2152020129C119599485 @default.
- W2152020129 hasConceptScore W2152020129C127413603 @default.
- W2152020129 hasConceptScore W2152020129C165801399 @default.
- W2152020129 hasConceptScore W2152020129C191897082 @default.
- W2152020129 hasConceptScore W2152020129C191952053 @default.
- W2152020129 hasConceptScore W2152020129C192562407 @default.
- W2152020129 hasConceptScore W2152020129C24326235 @default.
- W2152020129 hasConceptScore W2152020129C2779851234 @default.
- W2152020129 hasConceptScore W2152020129C38347018 @default.
- W2152020129 hasConceptScore W2152020129C49040817 @default.
- W2152020129 hasConceptScore W2152020129C52192207 @default.
- W2152020129 hasConceptScore W2152020129C544956773 @default.
- W2152020129 hasConceptScore W2152020129C57863236 @default.
- W2152020129 hasLocation W21520201291 @default.
- W2152020129 hasOpenAccess W2152020129 @default.
- W2152020129 hasPrimaryLocation W21520201291 @default.
- W2152020129 hasRelatedWork W1486571402 @default.
- W2152020129 hasRelatedWork W1532741526 @default.
- W2152020129 hasRelatedWork W1562575749 @default.
- W2152020129 hasRelatedWork W1568982366 @default.
- W2152020129 hasRelatedWork W1607158156 @default.
- W2152020129 hasRelatedWork W1665704780 @default.
- W2152020129 hasRelatedWork W1948109235 @default.
- W2152020129 hasRelatedWork W1993951975 @default.
- W2152020129 hasRelatedWork W1998021773 @default.
- W2152020129 hasRelatedWork W2021904857 @default.
- W2152020129 hasRelatedWork W2042183812 @default.
- W2152020129 hasRelatedWork W2053764683 @default.
- W2152020129 hasRelatedWork W2065689161 @default.
- W2152020129 hasRelatedWork W2116836242 @default.
- W2152020129 hasRelatedWork W2130768640 @default.
- W2152020129 hasRelatedWork W2158733747 @default.
- W2152020129 hasRelatedWork W2164088179 @default.
- W2152020129 hasRelatedWork W228392059 @default.
- W2152020129 hasRelatedWork W2952636346 @default.
- W2152020129 hasRelatedWork W2845193010 @default.
- W2152020129 isParatext "false" @default.
- W2152020129 isRetracted "false" @default.
- W2152020129 magId "2152020129" @default.
- W2152020129 workType "article" @default.