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- W2152051455 endingPage "708" @default.
- W2152051455 startingPage "705" @default.
- W2152051455 abstract "In this contribution we show experimental investigations regarding Periodic Pulse Reverse (PPR) plating for the filling of Through Silicon Vias that are aimed for the use in 3D integration applications. The purpose of this method is to prevent the use of plating additives that induce high process complexity in terms of process control and high process costs due to the high consumption of those additives. We therefore compare the effect of PPR plating without additives to that effect of PPR plating with additives. In first results with non-optimized PPR plating we already show the large gain in step coverage during TSV filling compared to standard DC plating." @default.
- W2152051455 created "2016-06-24" @default.
- W2152051455 creator A5022481573 @default.
- W2152051455 creator A5047693293 @default.
- W2152051455 creator A5060204434 @default.
- W2152051455 creator A5066778673 @default.
- W2152051455 date "2011-05-01" @default.
- W2152051455 modified "2023-09-28" @default.
- W2152051455 title "Investigations regarding Through Silicon Via filling for 3D integration by Periodic Pulse Reverse plating with and without additives" @default.
- W2152051455 cites W1979601109 @default.
- W2152051455 cites W2025489687 @default.
- W2152051455 cites W3162127202 @default.
- W2152051455 doi "https://doi.org/10.1016/j.mee.2010.06.040" @default.
- W2152051455 hasPublicationYear "2011" @default.
- W2152051455 type Work @default.
- W2152051455 sameAs 2152051455 @default.
- W2152051455 citedByCount "46" @default.
- W2152051455 countsByYear W21520514552012 @default.
- W2152051455 countsByYear W21520514552013 @default.
- W2152051455 countsByYear W21520514552014 @default.
- W2152051455 countsByYear W21520514552015 @default.
- W2152051455 countsByYear W21520514552016 @default.
- W2152051455 countsByYear W21520514552017 @default.
- W2152051455 countsByYear W21520514552018 @default.
- W2152051455 countsByYear W21520514552019 @default.
- W2152051455 countsByYear W21520514552020 @default.
- W2152051455 countsByYear W21520514552021 @default.
- W2152051455 countsByYear W21520514552022 @default.
- W2152051455 crossrefType "journal-article" @default.
- W2152051455 hasAuthorship W2152051455A5022481573 @default.
- W2152051455 hasAuthorship W2152051455A5047693293 @default.
- W2152051455 hasAuthorship W2152051455A5060204434 @default.
- W2152051455 hasAuthorship W2152051455A5066778673 @default.
- W2152051455 hasConcept C111919701 @default.
- W2152051455 hasConcept C119599485 @default.
- W2152051455 hasConcept C127313418 @default.
- W2152051455 hasConcept C127413603 @default.
- W2152051455 hasConcept C165801399 @default.
- W2152051455 hasConcept C192562407 @default.
- W2152051455 hasConcept C2776985018 @default.
- W2152051455 hasConcept C2780167933 @default.
- W2152051455 hasConcept C41008148 @default.
- W2152051455 hasConcept C45632049 @default.
- W2152051455 hasConcept C49040817 @default.
- W2152051455 hasConcept C544956773 @default.
- W2152051455 hasConcept C8058405 @default.
- W2152051455 hasConcept C98045186 @default.
- W2152051455 hasConceptScore W2152051455C111919701 @default.
- W2152051455 hasConceptScore W2152051455C119599485 @default.
- W2152051455 hasConceptScore W2152051455C127313418 @default.
- W2152051455 hasConceptScore W2152051455C127413603 @default.
- W2152051455 hasConceptScore W2152051455C165801399 @default.
- W2152051455 hasConceptScore W2152051455C192562407 @default.
- W2152051455 hasConceptScore W2152051455C2776985018 @default.
- W2152051455 hasConceptScore W2152051455C2780167933 @default.
- W2152051455 hasConceptScore W2152051455C41008148 @default.
- W2152051455 hasConceptScore W2152051455C45632049 @default.
- W2152051455 hasConceptScore W2152051455C49040817 @default.
- W2152051455 hasConceptScore W2152051455C544956773 @default.
- W2152051455 hasConceptScore W2152051455C8058405 @default.
- W2152051455 hasConceptScore W2152051455C98045186 @default.
- W2152051455 hasIssue "5" @default.
- W2152051455 hasLocation W21520514551 @default.
- W2152051455 hasOpenAccess W2152051455 @default.
- W2152051455 hasPrimaryLocation W21520514551 @default.
- W2152051455 hasRelatedWork W1982493670 @default.
- W2152051455 hasRelatedWork W2058676402 @default.
- W2152051455 hasRelatedWork W2312552982 @default.
- W2152051455 hasRelatedWork W2325771061 @default.
- W2152051455 hasRelatedWork W2329050645 @default.
- W2152051455 hasRelatedWork W2329285141 @default.
- W2152051455 hasRelatedWork W2799800065 @default.
- W2152051455 hasRelatedWork W2902546961 @default.
- W2152051455 hasRelatedWork W3036157976 @default.
- W2152051455 hasRelatedWork W4313653414 @default.
- W2152051455 hasVolume "88" @default.
- W2152051455 isParatext "false" @default.
- W2152051455 isRetracted "false" @default.
- W2152051455 magId "2152051455" @default.
- W2152051455 workType "article" @default.