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- W2152071700 abstract "A workstation-based simulation module for micromachined silicon diaphragm structures and its application to capacitive pressure transducers are reported. The module offers a menu-driven user interface, access to a growing database of material parameters and performance data, and an interface to commercial finite-element software. It provides the user with three-dimensional stress, deflection, resistance, and capacitance information and allows three-dimensional visualization of complex diaphragm structures. Finite-element simulations of boron-diffused, thin-diaphragm capacitive pressure transducers, produced using the dissolved-wafer process, allow effects such as diaphragm stress, dielectric-based stress compensation, corrugations and bosses to be explored. Detailed comparisons between the simulations and experimental data generally agree to within a few percent.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2152071700 date "1990-01-01" @default.
- W2152071700 modified "2023-09-26" @default.
- W2152071700 title "Pressure sensor design and simulation using the CAEMENS-D" @default.
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- W2152071700 doi "https://doi.org/10.1109/solsen.1990.109814" @default.
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