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- W2152249904 abstract "(001)-textured AlN thin films as needed for longitudinal bulk acoustic wave (BAW) devices exhibit large mechanical stress variations and large orientation variation as a function of growth substrate properties. We prepared thin silicon and silicon dioxide layers by sputter deposition to increase the roughness of thermal oxide films. The amorphous silicon films exhibited an rms roughness of 0.1 to 1.1 nm and the amorphous SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> an rms roughness ranging from 0.2 to 3.8 nm. In the following we studied stress, orientation, and rocking curve width of AlN films grown on these substrates. Mechanical stress varied from -700 to + 350 MPa and X-ray rocking curve width of AlN increased from 1.3 to 4.5 deg with increasing roughness. The effect of substrate RF bias during AlN deposition was studied as well. The piezoelectric d <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>33,f</sub> coefficient varied together with the rocking curve width and the mechanical stress. Optimal conditions so far identified yielded a d <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>33,f</sub> of 4.2 pm/V in case of a 1.2 mum piezoelectric AlN film grown on a amorphous sputtered SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> layer." @default.
- W2152249904 created "2016-06-24" @default.
- W2152249904 creator A5053190215 @default.
- W2152249904 creator A5071552056 @default.
- W2152249904 date "2008-11-01" @default.
- W2152249904 modified "2023-10-14" @default.
- W2152249904 title "Growth study of AlN on amorphous films with defined roughness" @default.
- W2152249904 cites W1966417765 @default.
- W2152249904 cites W1982618555 @default.
- W2152249904 cites W2033562417 @default.
- W2152249904 cites W2041690766 @default.
- W2152249904 cites W2046104316 @default.
- W2152249904 cites W2050890807 @default.
- W2152249904 cites W2091294104 @default.
- W2152249904 cites W2108551628 @default.
- W2152249904 doi "https://doi.org/10.1109/ultsym.2008.0219" @default.
- W2152249904 hasPublicationYear "2008" @default.
- W2152249904 type Work @default.
- W2152249904 sameAs 2152249904 @default.
- W2152249904 citedByCount "0" @default.
- W2152249904 crossrefType "proceedings-article" @default.
- W2152249904 hasAuthorship W2152249904A5053190215 @default.
- W2152249904 hasAuthorship W2152249904A5071552056 @default.
- W2152249904 hasConcept C100082104 @default.
- W2152249904 hasConcept C107365816 @default.
- W2152249904 hasConcept C111368507 @default.
- W2152249904 hasConcept C113196181 @default.
- W2152249904 hasConcept C127313418 @default.
- W2152249904 hasConcept C159985019 @default.
- W2152249904 hasConcept C171250308 @default.
- W2152249904 hasConcept C178790620 @default.
- W2152249904 hasConcept C185592680 @default.
- W2152249904 hasConcept C19067145 @default.
- W2152249904 hasConcept C192562407 @default.
- W2152249904 hasConcept C22423302 @default.
- W2152249904 hasConcept C2776390347 @default.
- W2152249904 hasConcept C2777289219 @default.
- W2152249904 hasConcept C2779667780 @default.
- W2152249904 hasConcept C49040817 @default.
- W2152249904 hasConcept C544956773 @default.
- W2152249904 hasConcept C56052488 @default.
- W2152249904 hasConcept C61427134 @default.
- W2152249904 hasConcept C71039073 @default.
- W2152249904 hasConcept C8010536 @default.
- W2152249904 hasConceptScore W2152249904C100082104 @default.
- W2152249904 hasConceptScore W2152249904C107365816 @default.
- W2152249904 hasConceptScore W2152249904C111368507 @default.
- W2152249904 hasConceptScore W2152249904C113196181 @default.
- W2152249904 hasConceptScore W2152249904C127313418 @default.
- W2152249904 hasConceptScore W2152249904C159985019 @default.
- W2152249904 hasConceptScore W2152249904C171250308 @default.
- W2152249904 hasConceptScore W2152249904C178790620 @default.
- W2152249904 hasConceptScore W2152249904C185592680 @default.
- W2152249904 hasConceptScore W2152249904C19067145 @default.
- W2152249904 hasConceptScore W2152249904C192562407 @default.
- W2152249904 hasConceptScore W2152249904C22423302 @default.
- W2152249904 hasConceptScore W2152249904C2776390347 @default.
- W2152249904 hasConceptScore W2152249904C2777289219 @default.
- W2152249904 hasConceptScore W2152249904C2779667780 @default.
- W2152249904 hasConceptScore W2152249904C49040817 @default.
- W2152249904 hasConceptScore W2152249904C544956773 @default.
- W2152249904 hasConceptScore W2152249904C56052488 @default.
- W2152249904 hasConceptScore W2152249904C61427134 @default.
- W2152249904 hasConceptScore W2152249904C71039073 @default.
- W2152249904 hasConceptScore W2152249904C8010536 @default.
- W2152249904 hasLocation W21522499041 @default.
- W2152249904 hasOpenAccess W2152249904 @default.
- W2152249904 hasPrimaryLocation W21522499041 @default.
- W2152249904 hasRelatedWork W132582492 @default.
- W2152249904 hasRelatedWork W2004363215 @default.
- W2152249904 hasRelatedWork W2023571262 @default.
- W2152249904 hasRelatedWork W2089633568 @default.
- W2152249904 hasRelatedWork W2159138826 @default.
- W2152249904 hasRelatedWork W2316948141 @default.
- W2152249904 hasRelatedWork W2348598805 @default.
- W2152249904 hasRelatedWork W2361873638 @default.
- W2152249904 hasRelatedWork W2571385234 @default.
- W2152249904 hasRelatedWork W385990669 @default.
- W2152249904 isParatext "false" @default.
- W2152249904 isRetracted "false" @default.
- W2152249904 magId "2152249904" @default.
- W2152249904 workType "article" @default.