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• W2152500129 abstract "8/spl times/4 cm/sup 2/ single-sided p/sup +/-i (or v)-n/sup +/ silicon microstrip sensors with coupling capacitors and polysilicon bias resistors were fabricated with the planar technology, and various techniques used to reduce the leakage currents of sensors and their results are presented. Different gettering processes have been employed to remove the impurities and defects from the sensor active regions, and the Electronic Research and Service Organization (ERSOs) Charge-Coupled Device (CCD) gettering technique, combined with backside polysilicon and oxide-nitride-oxide (ONO) deposition process, was found to be the most effective and suitable one. From the measurement results of the special p/sup +/-i (or v)-n/sup +/ junction test structures, it was found that the sensor leakage current mainly came from the side-wall leakage of its p/sup +/-strip. A modified LOCal Oxidation of Silicon (LOGOS) isolation process has been used to reduce this side-wall leakage. Also, the Sirtl-etch analysis of the sensor revealed that the side-wall leakage current has been caused by residual boron-implantation defects after annealing. These defects would concentrate along the edge of p/sup +/-strip and be enhanced to cause dislocations by the film-edge-induced stress effect. Several annealing techniques have also been studied to remove the boron-implantation damages. The fabricated prototype sensors have been tested in a beam at the CERN Super Proton Synchrotron area. The test results showed that the sensor concept under study is feasible." @default.
• W2152500129 created "2016-06-24" @default.
• W2152500129 creator A5012174689 @default.
• W2152500129 creator A5013480546 @default.
• W2152500129 creator A5016582234 @default.
• W2152500129 creator A5016833585 @default.
• W2152500129 creator A5031778927 @default.
• W2152500129 creator A5039543869 @default.
• W2152500129 creator A5045367437 @default.
• W2152500129 creator A5049010336 @default.
• W2152500129 creator A5083502111 @default.
• W2152500129 creator A5085168150 @default.
• W2152500129 creator A5088687912 @default.
• W2152500129 creator A5088763677 @default.
• W2152500129 creator A5089281033 @default.
• W2152500129 date "1998-04-01" @default.
• W2152500129 modified "2023-10-18" @default.
• W2152500129 title "Studies on reducing leakage current of large-area silicon microstrip sensors" @default.
• W2152500129 cites W1519868693 @default.
• W2152500129 cites W1555969351 @default.
• W2152500129 cites W1975776911 @default.
• W2152500129 cites W1980736571 @default.
• W2152500129 cites W2000520866 @default.
• W2152500129 cites W2003615122 @default.
• W2152500129 cites W2018284698 @default.
• W2152500129 cites W2037761766 @default.
• W2152500129 cites W2044422158 @default.
• W2152500129 cites W2048853516 @default.
• W2152500129 cites W2057873429 @default.
• W2152500129 cites W2062316274 @default.
• W2152500129 cites W2062715218 @default.
• W2152500129 cites W2079734824 @default.
• W2152500129 cites W2118486184 @default.
• W2152500129 cites W2150183767 @default.
• W2152500129 doi "https://doi.org/10.1109/23.664170" @default.
• W2152500129 hasPublicationYear "1998" @default.
• W2152500129 type Work @default.
• W2152500129 sameAs 2152500129 @default.
• W2152500129 citedByCount "2" @default.
• W2152500129 countsByYear W21525001292020 @default.
• W2152500129 crossrefType "journal-article" @default.
• W2152500129 hasAuthorship W2152500129A5012174689 @default.
• W2152500129 hasAuthorship W2152500129A5013480546 @default.
• W2152500129 hasAuthorship W2152500129A5016582234 @default.
• W2152500129 hasAuthorship W2152500129A5016833585 @default.
• W2152500129 hasAuthorship W2152500129A5031778927 @default.
• W2152500129 hasAuthorship W2152500129A5039543869 @default.
• W2152500129 hasAuthorship W2152500129A5045367437 @default.
• W2152500129 hasAuthorship W2152500129A5049010336 @default.
• W2152500129 hasAuthorship W2152500129A5083502111 @default.
• W2152500129 hasAuthorship W2152500129A5085168150 @default.
• W2152500129 hasAuthorship W2152500129A5088687912 @default.
• W2152500129 hasAuthorship W2152500129A5088763677 @default.
• W2152500129 hasAuthorship W2152500129A5089281033 @default.
• W2152500129 hasConcept C119599485 @default.
• W2152500129 hasConcept C125099081 @default.
• W2152500129 hasConcept C127413603 @default.
• W2152500129 hasConcept C137488568 @default.
• W2152500129 hasConcept C139719470 @default.
• W2152500129 hasConcept C159985019 @default.
• W2152500129 hasConcept C162324750 @default.
• W2152500129 hasConcept C165801399 @default.
• W2152500129 hasConcept C192562407 @default.
• W2152500129 hasConcept C2777042071 @default.
• W2152500129 hasConcept C2777855556 @default.
• W2152500129 hasConcept C49040817 @default.
• W2152500129 hasConcept C544956773 @default.
• W2152500129 hasConceptScore W2152500129C119599485 @default.
• W2152500129 hasConceptScore W2152500129C125099081 @default.
• W2152500129 hasConceptScore W2152500129C127413603 @default.
• W2152500129 hasConceptScore W2152500129C137488568 @default.
• W2152500129 hasConceptScore W2152500129C139719470 @default.
• W2152500129 hasConceptScore W2152500129C159985019 @default.
• W2152500129 hasConceptScore W2152500129C162324750 @default.
• W2152500129 hasConceptScore W2152500129C165801399 @default.
• W2152500129 hasConceptScore W2152500129C192562407 @default.
• W2152500129 hasConceptScore W2152500129C2777042071 @default.
• W2152500129 hasConceptScore W2152500129C2777855556 @default.
• W2152500129 hasConceptScore W2152500129C49040817 @default.
• W2152500129 hasConceptScore W2152500129C544956773 @default.
• W2152500129 hasLocation W21525001291 @default.
• W2152500129 hasOpenAccess W2152500129 @default.
• W2152500129 hasPrimaryLocation W21525001291 @default.
• W2152500129 hasRelatedWork W1768644424 @default.
• W2152500129 hasRelatedWork W2046998389 @default.
• W2152500129 hasRelatedWork W2047114352 @default.
• W2152500129 hasRelatedWork W2047348289 @default.
• W2152500129 hasRelatedWork W2063659459 @default.
• W2152500129 hasRelatedWork W2064661788 @default.
• W2152500129 hasRelatedWork W2091553941 @default.
• W2152500129 hasRelatedWork W2101341399 @default.
• W2152500129 hasRelatedWork W2131410368 @default.
• W2152500129 hasRelatedWork W2144448590 @default.
• W2152500129 hasRelatedWork W2157235051 @default.
• W2152500129 hasRelatedWork W2280637707 @default.
• W2152500129 hasRelatedWork W3147006695 @default.
• W2152500129 hasRelatedWork W1540977497 @default.
• W2152500129 hasRelatedWork W1608183782 @default.
• W2152500129 hasRelatedWork W1907044102 @default.
• W2152500129 hasRelatedWork W2411809321 @default.

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