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- W2152588671 abstract "The design and implementation of a new input switching capacitive microaccelerometer interface circuit with /spl mu/g resolution is presented. The accelerometers were fabricated on 50 /spl mu/m thick silicon-on-insulator (SOI) substrates using a two-mask, dry-release and low temperature process. Fabricated devices were interfaced with a high resolution, low noise and low power switched-capacitor integrated circuit (IC) implemented in a 2.5V 0.25 /spl mu/m N-well CMOS process with the chip size of 0.5/spl times/1.3mm/sup 2/. The measured sensitivity is 0.45V/g and the output noise floor is 4.4/spl mu/g//spl radic/Hz at 150Hz. The total power consumption is 5mW." @default.
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- W2152588671 date "2004-10-26" @default.
- W2152588671 modified "2023-09-24" @default.
- W2152588671 title "A new input switching scheme for a capacitive micro-g accelerometer" @default.
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- W2152588671 doi "https://doi.org/10.1109/vlsic.2004.1346598" @default.
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