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• W2152694550 abstract "Thin films of the intrinsic hydrogenated nanocrystalline silicon carbide (i-nc-SiC:H) with different crystalline content were prepared using mercury-sensitized photo-CVD technique and characterized by Raman and XRD measurements. The dark conductivity temperature dependent measurements indicated the thermally activated transport. Spin defect densities were studied by ESR measurements. A broad (2 mT) ESR resonance line with g-factor around g=2.007 was detected. With carbon content increase DB density decreases from N/sub S//spl sim/10/sup 19/cm/sup -3/ to around 10/sup 18/cm/sup -3/. It was found that the defect concentration and electronic properties of the films are mainly controlled by film crystallinity hindering with carbon content increase." @default.
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• W2152694550 date "2003-05-18" @default.
• W2152694550 modified "2023-09-27" @default.
• W2152694550 title "ESR studies of hydrogenated nanocrystalline silicon carbide" @default.
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