Matches in SemOpenAlex for { <https://semopenalex.org/work/W2152824077> ?p ?o ?g. }
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- W2152824077 endingPage "287" @default.
- W2152824077 startingPage "279" @default.
- W2152824077 abstract "Silicon oxide (SiO/sub 2/) films have extensive applications in integrated circuit fabrication technology, including passivation layers for integrated circuits, diffusion or photolithographic masks, and interlayer dielectrics for metal-insulator structures such as MOS transistors or multichip modules. The properties of SiO/sub 2/ films deposited by plasma enhanced chemical vapor deposition (PECVD) are determined by the nature and composition of the plasma, which is in turn controlled by the deposition variables involved in the PECVD process. The complex nature of particle dynamics within a plasma makes it very difficult to quantify the exact relationship between deposition conditions and critical output parameters reflecting film quality. In this study, the synthesis and optimization of process recipes using genetic algorithms is introduced. In order to characterize the PECVD of SiO/sub 2/ films deposited under varying conditions, a central composite designed experiment has been performed. Data from this experiment was then used to develop neural network based process models. A recipe synthesis procedure was then performed using the optimized neural network models to generate the necessary deposition conditions to obtain several novel film qualities, including zero stress, 100% uniformity, low permittivity, and minimal impurity concentration. This synthesis procedure utilized genetic algorithms, Powell's algorithm, the simplex method, and hybrid combinations thereof. Recipes predicted by these techniques were verified by experiment, and the performance of each synthesis method are compared. It was found that the genetic algorithm-based recipes generally produced films of superior quality. Deposition was carried out in a Plasma Therm 700 series PECVD system." @default.
- W2152824077 created "2016-06-24" @default.
- W2152824077 creator A5061370148 @default.
- W2152824077 creator A5076818871 @default.
- W2152824077 date "1997-05-01" @default.
- W2152824077 modified "2023-10-01" @default.
- W2152824077 title "Using neural network process models to perform PECVD silicon dioxide recipe synthesis via genetic algorithms" @default.
- W2152824077 cites W1979166118 @default.
- W2152824077 cites W2018474088 @default.
- W2152824077 cites W2046207381 @default.
- W2152824077 cites W2062060883 @default.
- W2152824077 cites W2101827854 @default.
- W2152824077 cites W2104137198 @default.
- W2152824077 cites W2111227295 @default.
- W2152824077 cites W2118223505 @default.
- W2152824077 cites W2128317509 @default.
- W2152824077 cites W2130425902 @default.
- W2152824077 cites W2171074980 @default.
- W2152824077 cites W2171862448 @default.
- W2152824077 cites W4238255529 @default.
- W2152824077 cites W4243013257 @default.
- W2152824077 doi "https://doi.org/10.1109/66.572083" @default.
- W2152824077 hasPublicationYear "1997" @default.
- W2152824077 type Work @default.
- W2152824077 sameAs 2152824077 @default.
- W2152824077 citedByCount "40" @default.
- W2152824077 countsByYear W21528240772012 @default.
- W2152824077 countsByYear W21528240772013 @default.
- W2152824077 countsByYear W21528240772018 @default.
- W2152824077 countsByYear W21528240772019 @default.
- W2152824077 countsByYear W21528240772020 @default.
- W2152824077 crossrefType "journal-article" @default.
- W2152824077 hasAuthorship W2152824077A5061370148 @default.
- W2152824077 hasAuthorship W2152824077A5076818871 @default.
- W2152824077 hasConcept C11413529 @default.
- W2152824077 hasConcept C127413603 @default.
- W2152824077 hasConcept C151730666 @default.
- W2152824077 hasConcept C154945302 @default.
- W2152824077 hasConcept C171250308 @default.
- W2152824077 hasConcept C192562407 @default.
- W2152824077 hasConcept C24326235 @default.
- W2152824077 hasConcept C2779227376 @default.
- W2152824077 hasConcept C2816523 @default.
- W2152824077 hasConcept C33574316 @default.
- W2152824077 hasConcept C38347018 @default.
- W2152824077 hasConcept C41008148 @default.
- W2152824077 hasConcept C50644808 @default.
- W2152824077 hasConcept C57410435 @default.
- W2152824077 hasConcept C64297162 @default.
- W2152824077 hasConcept C86803240 @default.
- W2152824077 hasConceptScore W2152824077C11413529 @default.
- W2152824077 hasConceptScore W2152824077C127413603 @default.
- W2152824077 hasConceptScore W2152824077C151730666 @default.
- W2152824077 hasConceptScore W2152824077C154945302 @default.
- W2152824077 hasConceptScore W2152824077C171250308 @default.
- W2152824077 hasConceptScore W2152824077C192562407 @default.
- W2152824077 hasConceptScore W2152824077C24326235 @default.
- W2152824077 hasConceptScore W2152824077C2779227376 @default.
- W2152824077 hasConceptScore W2152824077C2816523 @default.
- W2152824077 hasConceptScore W2152824077C33574316 @default.
- W2152824077 hasConceptScore W2152824077C38347018 @default.
- W2152824077 hasConceptScore W2152824077C41008148 @default.
- W2152824077 hasConceptScore W2152824077C50644808 @default.
- W2152824077 hasConceptScore W2152824077C57410435 @default.
- W2152824077 hasConceptScore W2152824077C64297162 @default.
- W2152824077 hasConceptScore W2152824077C86803240 @default.
- W2152824077 hasIssue "2" @default.
- W2152824077 hasLocation W21528240771 @default.
- W2152824077 hasOpenAccess W2152824077 @default.
- W2152824077 hasPrimaryLocation W21528240771 @default.
- W2152824077 hasRelatedWork W1086508198 @default.
- W2152824077 hasRelatedWork W1965997535 @default.
- W2152824077 hasRelatedWork W1995334627 @default.
- W2152824077 hasRelatedWork W2042475051 @default.
- W2152824077 hasRelatedWork W2970632265 @default.
- W2152824077 hasRelatedWork W4214569103 @default.
- W2152824077 hasRelatedWork W4312051036 @default.
- W2152824077 hasRelatedWork W778132138 @default.
- W2152824077 hasRelatedWork W2097538454 @default.
- W2152824077 hasRelatedWork W2152946510 @default.
- W2152824077 hasVolume "10" @default.
- W2152824077 isParatext "false" @default.
- W2152824077 isRetracted "false" @default.
- W2152824077 magId "2152824077" @default.
- W2152824077 workType "article" @default.