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- W2152866957 abstract "Dry etching of InP-based semiconductors is carried out by inductively coupled plasma (ICP) for optoelectronic device fabrication. The etching conditions for different chemical mixtures are optimized to ensure high anisotropy and smooth surface morphology." @default.
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- W2152866957 date "2007-05-01" @default.
- W2152866957 modified "2023-09-27" @default.
- W2152866957 title "Room Temperature Dry Etching of INP-Based Semiconductors for Optoelectronic Device Fabrication Using Inductively Coupled Plasma" @default.
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- W2152866957 doi "https://doi.org/10.1109/iciprm.2007.381165" @default.
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