Matches in SemOpenAlex for { <https://semopenalex.org/work/W2152912684> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2152912684 abstract "Transient diffusion accounts for the majority of profile displacement in many modern processes. The last few years have seen considerable progress in understanding this anomalous diffusion, and predictive models have already been deployed in process development. Nevertheless, the evolving reduction in junction depth continues to challenge modeling capability. This work critically re-examines the theoretical basis of the present models and explores their limitations." @default.
- W2152912684 created "2016-06-24" @default.
- W2152912684 creator A5035266560 @default.
- W2152912684 date "2002-11-22" @default.
- W2152912684 modified "2023-09-24" @default.
- W2152912684 title "Progress in predicting transient diffusion" @default.
- W2152912684 cites W2003295475 @default.
- W2152912684 cites W2012395578 @default.
- W2152912684 cites W2019976417 @default.
- W2152912684 cites W2026415822 @default.
- W2152912684 cites W2038475770 @default.
- W2152912684 cites W2047319494 @default.
- W2152912684 cites W2069144385 @default.
- W2152912684 cites W2077994487 @default.
- W2152912684 cites W2081445031 @default.
- W2152912684 cites W2128190905 @default.
- W2152912684 doi "https://doi.org/10.1109/sispad.1997.621322" @default.
- W2152912684 hasPublicationYear "2002" @default.
- W2152912684 type Work @default.
- W2152912684 sameAs 2152912684 @default.
- W2152912684 citedByCount "3" @default.
- W2152912684 countsByYear W21529126842018 @default.
- W2152912684 crossrefType "proceedings-article" @default.
- W2152912684 hasAuthorship W2152912684A5035266560 @default.
- W2152912684 hasConcept C107551265 @default.
- W2152912684 hasConcept C111919701 @default.
- W2152912684 hasConcept C112930515 @default.
- W2152912684 hasConcept C121332964 @default.
- W2152912684 hasConcept C121864883 @default.
- W2152912684 hasConcept C127413603 @default.
- W2152912684 hasConcept C144133560 @default.
- W2152912684 hasConcept C15744967 @default.
- W2152912684 hasConcept C18762648 @default.
- W2152912684 hasConcept C2780799671 @default.
- W2152912684 hasConcept C3017618536 @default.
- W2152912684 hasConcept C41008148 @default.
- W2152912684 hasConcept C542102704 @default.
- W2152912684 hasConcept C56739046 @default.
- W2152912684 hasConcept C68710425 @default.
- W2152912684 hasConcept C69357855 @default.
- W2152912684 hasConcept C78519656 @default.
- W2152912684 hasConcept C97355855 @default.
- W2152912684 hasConcept C98045186 @default.
- W2152912684 hasConceptScore W2152912684C107551265 @default.
- W2152912684 hasConceptScore W2152912684C111919701 @default.
- W2152912684 hasConceptScore W2152912684C112930515 @default.
- W2152912684 hasConceptScore W2152912684C121332964 @default.
- W2152912684 hasConceptScore W2152912684C121864883 @default.
- W2152912684 hasConceptScore W2152912684C127413603 @default.
- W2152912684 hasConceptScore W2152912684C144133560 @default.
- W2152912684 hasConceptScore W2152912684C15744967 @default.
- W2152912684 hasConceptScore W2152912684C18762648 @default.
- W2152912684 hasConceptScore W2152912684C2780799671 @default.
- W2152912684 hasConceptScore W2152912684C3017618536 @default.
- W2152912684 hasConceptScore W2152912684C41008148 @default.
- W2152912684 hasConceptScore W2152912684C542102704 @default.
- W2152912684 hasConceptScore W2152912684C56739046 @default.
- W2152912684 hasConceptScore W2152912684C68710425 @default.
- W2152912684 hasConceptScore W2152912684C69357855 @default.
- W2152912684 hasConceptScore W2152912684C78519656 @default.
- W2152912684 hasConceptScore W2152912684C97355855 @default.
- W2152912684 hasConceptScore W2152912684C98045186 @default.
- W2152912684 hasLocation W21529126841 @default.
- W2152912684 hasOpenAccess W2152912684 @default.
- W2152912684 hasPrimaryLocation W21529126841 @default.
- W2152912684 hasRelatedWork W1493447296 @default.
- W2152912684 hasRelatedWork W1768104388 @default.
- W2152912684 hasRelatedWork W1827279277 @default.
- W2152912684 hasRelatedWork W1931578596 @default.
- W2152912684 hasRelatedWork W1966283492 @default.
- W2152912684 hasRelatedWork W1975190381 @default.
- W2152912684 hasRelatedWork W1999446866 @default.
- W2152912684 hasRelatedWork W2006755408 @default.
- W2152912684 hasRelatedWork W2025457614 @default.
- W2152912684 hasRelatedWork W2035312259 @default.
- W2152912684 hasRelatedWork W2074400284 @default.
- W2152912684 hasRelatedWork W2088206749 @default.
- W2152912684 hasRelatedWork W2112559999 @default.
- W2152912684 hasRelatedWork W2129952959 @default.
- W2152912684 hasRelatedWork W2136630992 @default.
- W2152912684 hasRelatedWork W2153415530 @default.
- W2152912684 hasRelatedWork W2170878665 @default.
- W2152912684 hasRelatedWork W2559371143 @default.
- W2152912684 hasRelatedWork W2579827181 @default.
- W2152912684 hasRelatedWork W3082882859 @default.
- W2152912684 isParatext "false" @default.
- W2152912684 isRetracted "false" @default.
- W2152912684 magId "2152912684" @default.
- W2152912684 workType "article" @default.