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- W2153079423 abstract "The self-testable accelerometer, which is a modification of a piezoresistive, doubly supported cantilever structure, is discussed along with second-order effects. In order to incorporate the self-test function, the overforce stops which limit travel have been enlarged to form electrodes. The cross-section of the device is shown. A metal plate is deposited on the seismic mass and connected across the flexures to an outside bond pad. The top and bottom caps that provide protection against overforce and contamination are processed in such a manner that they are electrically connected to the substrate, thereby surrounding the self-test electrode in an electrically neutral environment.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2153079423 date "1990-01-01" @default.
- W2153079423 modified "2023-09-27" @default.
- W2153079423 title "Second-order effects in self-testable accelerometers" @default.
- W2153079423 cites W1929445452 @default.
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- W2153079423 doi "https://doi.org/10.1109/solsen.1990.109841" @default.
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