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- W2153313692 abstract "RTP was employed to metamorphose the ultra-thin top Si (111) layer into 3C-SiC, suppressing the 3D growth of SiC and improving the undulation at the interface between the top SiC and buried oxide layers. As a result, a very flat and uniform 3 nm thick 3C-SiC seed layer was obtained. It implies a high possibility for growing thick epitaxial 3C-SiC layers onto ultra-thin 3C-SiC seed layers formed by RTP." @default.
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- W2153313692 date "2006-01-05" @default.
- W2153313692 modified "2023-09-27" @default.
- W2153313692 title "Metamorphosis of ultra-thin top Si layer of SOI substrate into 3C-SiC using a rapid thermal process" @default.
- W2153313692 cites W11890891 @default.
- W2153313692 doi "https://doi.org/10.1109/imfedk.2004.1566407" @default.
- W2153313692 hasPublicationYear "2006" @default.
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