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- W2153628837 abstract "An experiment to determine the effect of gate electrode resistivity on circuit speed gave unexpected results: circuits with the lowest sheet resistance had the poorest circuit speed. Explanation of this behaviour required development of a new high-frequency method of measuring the impedance of the gate electrode. This method revealed that the circuits with a composite gate electrode had been formed with a partial discontinuity. The measurement technique is described, and the evidence of the discontinuity is shown. The effect of the discontinuity on device and circuit speed is demonstrated." @default.
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- W2153628837 date "1996-05-01" @default.
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- W2153628837 title "Identification of gate electrode discontinuities in submicron CMOS technologies, and effect on circuit performance" @default.
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- W2153628837 doi "https://doi.org/10.1109/16.491253" @default.
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