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- W2154157817 abstract "An improved two-frequency C-V extraction guideline for ultra-thin gate structures is proposed. The measured dissipation should be less than 1.1 at least at one of the two measurement frequencies, in order to reduce the gate oxide thickness measurement error below 4%. We show that the proposed guideline sets certain limitations on the device area, which must be reduced as the gate oxide shrinks, in order to keep the dissipation below 1.1, while not increasing the device impedance above the measurement limit of the LCR meter. We have also demonstrated that an additional parasitic inductance effect must be included in the equivalent circuit model if the measurement frequency is above 1 MHz." @default.
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- W2154157817 date "2002-11-13" @default.
- W2154157817 modified "2023-09-26" @default.
- W2154157817 title "Limitations of the two-frequency capacitance measurement technique applied to ultra-thin SiO/sub 2/ gate oxides" @default.
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- W2154157817 doi "https://doi.org/10.1109/icmts.2001.928637" @default.
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