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• W2154261856 abstract "A dynamic-stress analysis method, based on time-resolved micro Raman spectroscopy, has been developed for reliability studies of microelectromechanical systems. This novel technique is illustrated by measuring temporally and spatially resolved stress maps of a piezoelectrically actuated silicon microcantilever when driven at its first- (6.094 kHz) and second-order (37.89 kHz) resonant frequencies. Stress amplitudes of up to 180 plusmn 10 MPa were measured at the maximum stress locations. The time-resolved Raman stress measurements are compared to the results of finite-element analysis and laser Doppler vibrometry.[2008-0003]." @default.
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• W2154261856 date "2008-12-01" @default.
• W2154261856 modified "2023-09-26" @default.
• W2154261856 title "Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy" @default.
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• W2154261856 doi "https://doi.org/10.1109/jmems.2008.2004849" @default.
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