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- W2154344157 abstract "The dry etch of polysilicon doped with phosphorus using a parallel plate etcher was studied. A standard dry etching process program (used in CMOS 3 /spl mu/m technology) was compared with a proposed modified program in order to obtain a better anisotropy and lower values for underetching and dimensional dispersion on the wafer." @default.
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- W2154344157 date "2002-11-22" @default.
- W2154344157 modified "2023-09-27" @default.
- W2154344157 title "Polysilicon gate dry etching process optimization in CMOS technologies" @default.
- W2154344157 cites W1979078109 @default.
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- W2154344157 doi "https://doi.org/10.1109/smicnd.1997.651588" @default.
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