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• W2154383292 abstract "Recently, we reported that amorphous TeO2 thin films possess a high negative temperature coefficient of delay (TCD) contrary to its bulk counterpart, and are useful for the temperature stability of LiNbO3 based surface acoustic wave (SAW) devices possessing a positive TCD. In the present work TeO2 thin film deposited under 60% O2 and 40% Ar gas environment, is found to be most suitable as an over layer to yield a temperature stable device at reasonably low thickness. The SAW propagation and TCD characteristics of the TeO2/IDTs/128° Y-X LiNbO3 layered structure have been studied. It is found that ~ 0.01 thick TeO2 over-layer reduces the TCD of the device from 76 ppm °C -1 to almost zero (~ 2 ppm °C -1 ) without deteriorating its efficiency. Material parameters of the deposited TeO2 thin film are also determined. Metallic cap of the packaged device was removed and amorphous TeO2 film of increasing thickness (0.3 - 4.5 µm) was sputtered onto the SAW filters containing IDT electrodes and the SAW propagation and TCD characteristics were measured for each thickness. To protect the aluminium IDT electrodes on the SAW device, TeO2 over layer was deposited intentionally at room temperature. Thickness of the films was measured every time separately using a surface profiler (Dektak IIA) by depositing the films on quartz substrates simultaneously. TeO2 over layer was deposited under different sputtering gas composition (25%, 40% and 60% O2 in the Ar + O2 gas mixture). The typical film deposition parameters are presented in table I. Deposition rate of TeO2 thin film was found to be decreasing from 0.35 µm h -1 to 0.2 µm h -1 with increase in the O2 content in sputtering gas mixture from 25% to 60%." @default.
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• W2154383292 date "2006-03-10" @default.
• W2154383292 modified "2023-09-22" @default.
• W2154383292 title "Temperature coefficient of elastic constants of sputtered TeO/sub 2/ thin film for zero TCD SAW devices" @default.
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• W2154383292 doi "https://doi.org/10.1109/ultsym.2005.1603094" @default.
• W2154383292 hasPublicationYear "2006" @default.
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