Matches in SemOpenAlex for { <https://semopenalex.org/work/W2154633442> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2154633442 abstract "A number of methods are available for determining the particle content in chemically reactive fluids such as liquid, gaseous or supercritical processing materials. Each method has advantages and disadvantages. This paper describes the method of particle capture on filters followed by microscopic analysis. Although this method has been widely applied to measuring particle levels in various liquids and gases, and for airborne particle sampling, it has not been extensively used for highly reactive semiconductor processing materials. A sampling system suitable for implementing this method in difficult to measure fluids, and the steps necessary to perform the capture process are described. A method for quantifying the particle concentration in the fluid based upon an analysis of the particles observed on the filter is also described. Typical results of contaminant particles detected in liquid and gaseous materials used for semiconductor wafer processing are also presented. These data provide information on the particle content of fluid source containers and transfer lines, and the efficiency of filters in removing such particles in flowing systems. Particle SEM images and compositional data obtained through energy dispersive X-ray spectroscopy (EDS) are presented. Such information aids in the tracing of particle sources, and the eventual elimination of such sources." @default.
- W2154633442 created "2016-06-24" @default.
- W2154633442 creator A5006941106 @default.
- W2154633442 date "2008-05-01" @default.
- W2154633442 modified "2023-09-27" @default.
- W2154633442 title "Capture and Analysis of Particulate Contamination in Gaseous and Liquid Processing Materials" @default.
- W2154633442 cites W2158602501 @default.
- W2154633442 cites W3110163268 @default.
- W2154633442 cites W89336106 @default.
- W2154633442 doi "https://doi.org/10.1109/asmc.2008.4529059" @default.
- W2154633442 hasPublicationYear "2008" @default.
- W2154633442 type Work @default.
- W2154633442 sameAs 2154633442 @default.
- W2154633442 citedByCount "0" @default.
- W2154633442 crossrefType "proceedings-article" @default.
- W2154633442 hasAuthorship W2154633442A5006941106 @default.
- W2154633442 hasConcept C106131492 @default.
- W2154633442 hasConcept C111368507 @default.
- W2154633442 hasConcept C111919701 @default.
- W2154633442 hasConcept C112570922 @default.
- W2154633442 hasConcept C118419359 @default.
- W2154633442 hasConcept C127313418 @default.
- W2154633442 hasConcept C127413603 @default.
- W2154633442 hasConcept C138673069 @default.
- W2154633442 hasConcept C160671074 @default.
- W2154633442 hasConcept C171250308 @default.
- W2154633442 hasConcept C178790620 @default.
- W2154633442 hasConcept C185592680 @default.
- W2154633442 hasConcept C18903297 @default.
- W2154633442 hasConcept C192562407 @default.
- W2154633442 hasConcept C21880701 @default.
- W2154633442 hasConcept C24245907 @default.
- W2154633442 hasConcept C2778517922 @default.
- W2154633442 hasConcept C31972630 @default.
- W2154633442 hasConcept C41008148 @default.
- W2154633442 hasConcept C52421305 @default.
- W2154633442 hasConcept C86803240 @default.
- W2154633442 hasConceptScore W2154633442C106131492 @default.
- W2154633442 hasConceptScore W2154633442C111368507 @default.
- W2154633442 hasConceptScore W2154633442C111919701 @default.
- W2154633442 hasConceptScore W2154633442C112570922 @default.
- W2154633442 hasConceptScore W2154633442C118419359 @default.
- W2154633442 hasConceptScore W2154633442C127313418 @default.
- W2154633442 hasConceptScore W2154633442C127413603 @default.
- W2154633442 hasConceptScore W2154633442C138673069 @default.
- W2154633442 hasConceptScore W2154633442C160671074 @default.
- W2154633442 hasConceptScore W2154633442C171250308 @default.
- W2154633442 hasConceptScore W2154633442C178790620 @default.
- W2154633442 hasConceptScore W2154633442C185592680 @default.
- W2154633442 hasConceptScore W2154633442C18903297 @default.
- W2154633442 hasConceptScore W2154633442C192562407 @default.
- W2154633442 hasConceptScore W2154633442C21880701 @default.
- W2154633442 hasConceptScore W2154633442C24245907 @default.
- W2154633442 hasConceptScore W2154633442C2778517922 @default.
- W2154633442 hasConceptScore W2154633442C31972630 @default.
- W2154633442 hasConceptScore W2154633442C41008148 @default.
- W2154633442 hasConceptScore W2154633442C52421305 @default.
- W2154633442 hasConceptScore W2154633442C86803240 @default.
- W2154633442 hasLocation W21546334421 @default.
- W2154633442 hasOpenAccess W2154633442 @default.
- W2154633442 hasPrimaryLocation W21546334421 @default.
- W2154633442 hasRelatedWork W1930711015 @default.
- W2154633442 hasRelatedWork W1995725424 @default.
- W2154633442 hasRelatedWork W2001494057 @default.
- W2154633442 hasRelatedWork W2051932160 @default.
- W2154633442 hasRelatedWork W2119167314 @default.
- W2154633442 hasRelatedWork W2154633442 @default.
- W2154633442 hasRelatedWork W2351108534 @default.
- W2154633442 hasRelatedWork W2359006540 @default.
- W2154633442 hasRelatedWork W2805805001 @default.
- W2154633442 hasRelatedWork W4307653544 @default.
- W2154633442 isParatext "false" @default.
- W2154633442 isRetracted "false" @default.
- W2154633442 magId "2154633442" @default.
- W2154633442 workType "article" @default.