Matches in SemOpenAlex for { <https://semopenalex.org/work/W2154846114> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2154846114 endingPage "6" @default.
- W2154846114 startingPage "1" @default.
- W2154846114 abstract "Thermal stability of a porous low-k film is a critical issue for application consideration in the back-end-of-line. In this study, thermal stability of the porous silicate has been investigated by changing the thermal processing temperatures. Experimental results have shown that the dielectric constant of the porous silicate still remains below 2.0 after thermal processing at 500 °C for 1 h. A series of material analysis techniques and electrical characteristics have been used to verify the physical and chemical characteristics of the porous silicate film." @default.
- W2154846114 created "2016-06-24" @default.
- W2154846114 creator A5002327772 @default.
- W2154846114 creator A5003303543 @default.
- W2154846114 creator A5042786881 @default.
- W2154846114 creator A5046730456 @default.
- W2154846114 creator A5067866940 @default.
- W2154846114 creator A5081838658 @default.
- W2154846114 creator A5082722021 @default.
- W2154846114 date "2002-07-01" @default.
- W2154846114 modified "2023-10-18" @default.
- W2154846114 title "Characterization of porous silicate for ultra-low k dielectric application" @default.
- W2154846114 cites W1989139693 @default.
- W2154846114 cites W1998033079 @default.
- W2154846114 cites W2009282565 @default.
- W2154846114 cites W2020220480 @default.
- W2154846114 cites W2088886837 @default.
- W2154846114 cites W2092713961 @default.
- W2154846114 cites W2113522561 @default.
- W2154846114 cites W2132729131 @default.
- W2154846114 cites W2138966144 @default.
- W2154846114 cites W2150529600 @default.
- W2154846114 cites W2151075324 @default.
- W2154846114 cites W2313679833 @default.
- W2154846114 doi "https://doi.org/10.1016/s0040-6090(02)00423-6" @default.
- W2154846114 hasPublicationYear "2002" @default.
- W2154846114 type Work @default.
- W2154846114 sameAs 2154846114 @default.
- W2154846114 citedByCount "24" @default.
- W2154846114 countsByYear W21548461142012 @default.
- W2154846114 countsByYear W21548461142013 @default.
- W2154846114 countsByYear W21548461142014 @default.
- W2154846114 countsByYear W21548461142015 @default.
- W2154846114 countsByYear W21548461142016 @default.
- W2154846114 countsByYear W21548461142018 @default.
- W2154846114 countsByYear W21548461142019 @default.
- W2154846114 crossrefType "journal-article" @default.
- W2154846114 hasAuthorship W2154846114A5002327772 @default.
- W2154846114 hasAuthorship W2154846114A5003303543 @default.
- W2154846114 hasAuthorship W2154846114A5042786881 @default.
- W2154846114 hasAuthorship W2154846114A5046730456 @default.
- W2154846114 hasAuthorship W2154846114A5067866940 @default.
- W2154846114 hasAuthorship W2154846114A5081838658 @default.
- W2154846114 hasAuthorship W2154846114A5082722021 @default.
- W2154846114 hasConcept C105569014 @default.
- W2154846114 hasConcept C121332964 @default.
- W2154846114 hasConcept C127413603 @default.
- W2154846114 hasConcept C133386390 @default.
- W2154846114 hasConcept C159985019 @default.
- W2154846114 hasConcept C171250308 @default.
- W2154846114 hasConcept C185592680 @default.
- W2154846114 hasConcept C192562407 @default.
- W2154846114 hasConcept C199289684 @default.
- W2154846114 hasConcept C204530211 @default.
- W2154846114 hasConcept C2777335606 @default.
- W2154846114 hasConcept C2780841128 @default.
- W2154846114 hasConcept C42360764 @default.
- W2154846114 hasConcept C49040817 @default.
- W2154846114 hasConcept C59061564 @default.
- W2154846114 hasConcept C6648577 @default.
- W2154846114 hasConcept C97355855 @default.
- W2154846114 hasConceptScore W2154846114C105569014 @default.
- W2154846114 hasConceptScore W2154846114C121332964 @default.
- W2154846114 hasConceptScore W2154846114C127413603 @default.
- W2154846114 hasConceptScore W2154846114C133386390 @default.
- W2154846114 hasConceptScore W2154846114C159985019 @default.
- W2154846114 hasConceptScore W2154846114C171250308 @default.
- W2154846114 hasConceptScore W2154846114C185592680 @default.
- W2154846114 hasConceptScore W2154846114C192562407 @default.
- W2154846114 hasConceptScore W2154846114C199289684 @default.
- W2154846114 hasConceptScore W2154846114C204530211 @default.
- W2154846114 hasConceptScore W2154846114C2777335606 @default.
- W2154846114 hasConceptScore W2154846114C2780841128 @default.
- W2154846114 hasConceptScore W2154846114C42360764 @default.
- W2154846114 hasConceptScore W2154846114C49040817 @default.
- W2154846114 hasConceptScore W2154846114C59061564 @default.
- W2154846114 hasConceptScore W2154846114C6648577 @default.
- W2154846114 hasConceptScore W2154846114C97355855 @default.
- W2154846114 hasIssue "1" @default.
- W2154846114 hasLocation W21548461141 @default.
- W2154846114 hasOpenAccess W2154846114 @default.
- W2154846114 hasPrimaryLocation W21548461141 @default.
- W2154846114 hasRelatedWork W1968527418 @default.
- W2154846114 hasRelatedWork W2010837745 @default.
- W2154846114 hasRelatedWork W2061056071 @default.
- W2154846114 hasRelatedWork W2083400821 @default.
- W2154846114 hasRelatedWork W2359463116 @default.
- W2154846114 hasRelatedWork W2362875760 @default.
- W2154846114 hasRelatedWork W2387021660 @default.
- W2154846114 hasRelatedWork W2393554192 @default.
- W2154846114 hasRelatedWork W383789482 @default.
- W2154846114 hasRelatedWork W392422591 @default.
- W2154846114 hasVolume "414" @default.
- W2154846114 isParatext "false" @default.
- W2154846114 isRetracted "false" @default.
- W2154846114 magId "2154846114" @default.
- W2154846114 workType "article" @default.