Matches in SemOpenAlex for { <https://semopenalex.org/work/W2154987135> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2154987135 endingPage "351" @default.
- W2154987135 startingPage "345" @default.
- W2154987135 abstract "Abstract A differential capacitive three‐axis silicon‐on‐insulator (SOI) accelerometer using vertical comb electrodes fabricated by using surface‐micromachining technique has been developed. The accelerometer structures consist of only the device layer of a SOI wafer without lower or upper electrodes. The vertical comb electrodes of this device have structures different from conventional vertical comb electrodes. The bottom faces of both movable and fixed electrodes are in the same plane at their initial positions but their heights are different. Three‐axis acceleration can be sensed with differential capacitance detection by using only these vertical comb electrodes. The device structures were successfully fabricated using self‐alignment and Deep‐RIE processes. As an initial result, the capacitance changes against three‐axis acceleration were observed and the device sensitivities to three‐axis accelerations were measured. The capacitance sensitivities of X , Y and Z ‐axis were 1.01, 0.898 and 0.989 fF/G, respectively. Copyright © 2009 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc." @default.
- W2154987135 created "2016-06-24" @default.
- W2154987135 creator A5012865954 @default.
- W2154987135 creator A5064074469 @default.
- W2154987135 creator A5088979644 @default.
- W2154987135 creator A5045184002 @default.
- W2154987135 date "2009-04-22" @default.
- W2154987135 modified "2023-10-17" @default.
- W2154987135 title "Design and fabrication of a differential capacitive three‐axis SOI accelerometer using vertical comb electrodes" @default.
- W2154987135 cites W2095302604 @default.
- W2154987135 cites W2117400239 @default.
- W2154987135 cites W2164147723 @default.
- W2154987135 doi "https://doi.org/10.1002/tee.20416" @default.
- W2154987135 hasPublicationYear "2009" @default.
- W2154987135 type Work @default.
- W2154987135 sameAs 2154987135 @default.
- W2154987135 citedByCount "15" @default.
- W2154987135 countsByYear W21549871352012 @default.
- W2154987135 countsByYear W21549871352015 @default.
- W2154987135 countsByYear W21549871352016 @default.
- W2154987135 countsByYear W21549871352019 @default.
- W2154987135 countsByYear W21549871352020 @default.
- W2154987135 crossrefType "journal-article" @default.
- W2154987135 hasAuthorship W2154987135A5012865954 @default.
- W2154987135 hasAuthorship W2154987135A5045184002 @default.
- W2154987135 hasAuthorship W2154987135A5064074469 @default.
- W2154987135 hasAuthorship W2154987135A5088979644 @default.
- W2154987135 hasConcept C117896860 @default.
- W2154987135 hasConcept C119599485 @default.
- W2154987135 hasConcept C121332964 @default.
- W2154987135 hasConcept C127413603 @default.
- W2154987135 hasConcept C136525101 @default.
- W2154987135 hasConcept C142724271 @default.
- W2154987135 hasConcept C145667562 @default.
- W2154987135 hasConcept C150072415 @default.
- W2154987135 hasConcept C160671074 @default.
- W2154987135 hasConcept C17525397 @default.
- W2154987135 hasConcept C192562407 @default.
- W2154987135 hasConcept C204787440 @default.
- W2154987135 hasConcept C206755178 @default.
- W2154987135 hasConcept C30066665 @default.
- W2154987135 hasConcept C41075158 @default.
- W2154987135 hasConcept C49040817 @default.
- W2154987135 hasConcept C53143962 @default.
- W2154987135 hasConcept C544956773 @default.
- W2154987135 hasConcept C62520636 @default.
- W2154987135 hasConcept C71924100 @default.
- W2154987135 hasConcept C74650414 @default.
- W2154987135 hasConcept C89805583 @default.
- W2154987135 hasConceptScore W2154987135C117896860 @default.
- W2154987135 hasConceptScore W2154987135C119599485 @default.
- W2154987135 hasConceptScore W2154987135C121332964 @default.
- W2154987135 hasConceptScore W2154987135C127413603 @default.
- W2154987135 hasConceptScore W2154987135C136525101 @default.
- W2154987135 hasConceptScore W2154987135C142724271 @default.
- W2154987135 hasConceptScore W2154987135C145667562 @default.
- W2154987135 hasConceptScore W2154987135C150072415 @default.
- W2154987135 hasConceptScore W2154987135C160671074 @default.
- W2154987135 hasConceptScore W2154987135C17525397 @default.
- W2154987135 hasConceptScore W2154987135C192562407 @default.
- W2154987135 hasConceptScore W2154987135C204787440 @default.
- W2154987135 hasConceptScore W2154987135C206755178 @default.
- W2154987135 hasConceptScore W2154987135C30066665 @default.
- W2154987135 hasConceptScore W2154987135C41075158 @default.
- W2154987135 hasConceptScore W2154987135C49040817 @default.
- W2154987135 hasConceptScore W2154987135C53143962 @default.
- W2154987135 hasConceptScore W2154987135C544956773 @default.
- W2154987135 hasConceptScore W2154987135C62520636 @default.
- W2154987135 hasConceptScore W2154987135C71924100 @default.
- W2154987135 hasConceptScore W2154987135C74650414 @default.
- W2154987135 hasConceptScore W2154987135C89805583 @default.
- W2154987135 hasIssue "3" @default.
- W2154987135 hasLocation W21549871351 @default.
- W2154987135 hasOpenAccess W2154987135 @default.
- W2154987135 hasPrimaryLocation W21549871351 @default.
- W2154987135 hasRelatedWork W2000270739 @default.
- W2154987135 hasRelatedWork W2022641457 @default.
- W2154987135 hasRelatedWork W2059967747 @default.
- W2154987135 hasRelatedWork W2061864336 @default.
- W2154987135 hasRelatedWork W2089798199 @default.
- W2154987135 hasRelatedWork W2096478611 @default.
- W2154987135 hasRelatedWork W2149069570 @default.
- W2154987135 hasRelatedWork W2159636143 @default.
- W2154987135 hasRelatedWork W2362936699 @default.
- W2154987135 hasRelatedWork W3215636742 @default.
- W2154987135 hasVolume "4" @default.
- W2154987135 isParatext "false" @default.
- W2154987135 isRetracted "false" @default.
- W2154987135 magId "2154987135" @default.
- W2154987135 workType "article" @default.