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- W2155083346 abstract "In this paper, we report fully depleted silicon-on-insulator (FDSOI) MOSFETs with polysilicon (poly) raised source and drain (S/D) by using chemical mechanical polish (CMP). This poly-raised FDSOI MOSFET, with channel thickness of 30 nm and deposited poly thickness of 80 nm, has shown a 95% reduction in source and drain series resistance and 90% reduction in contact resistance, compared with conventional FDSOI devices with the same channel thickness and without polysilicon at the S/D region. Silicide can be used to further reduce the active resistance." @default.
- W2155083346 created "2016-06-24" @default.
- W2155083346 creator A5038426324 @default.
- W2155083346 creator A5040436995 @default.
- W2155083346 creator A5068163990 @default.
- W2155083346 date "2002-11-13" @default.
- W2155083346 modified "2023-10-01" @default.
- W2155083346 title "Low S/D resistance FDSOI MOSFETs using polysilicon and CMP" @default.
- W2155083346 cites W2120434444 @default.
- W2155083346 cites W2130805035 @default.
- W2155083346 doi "https://doi.org/10.1109/hkedm.2001.946925" @default.
- W2155083346 hasPublicationYear "2002" @default.
- W2155083346 type Work @default.
- W2155083346 sameAs 2155083346 @default.
- W2155083346 citedByCount "4" @default.
- W2155083346 crossrefType "proceedings-article" @default.
- W2155083346 hasAuthorship W2155083346A5038426324 @default.
- W2155083346 hasAuthorship W2155083346A5040436995 @default.
- W2155083346 hasAuthorship W2155083346A5068163990 @default.
- W2155083346 hasConcept C119599485 @default.
- W2155083346 hasConcept C123671423 @default.
- W2155083346 hasConcept C127413603 @default.
- W2155083346 hasConcept C14485415 @default.
- W2155083346 hasConcept C159985019 @default.
- W2155083346 hasConcept C165801399 @default.
- W2155083346 hasConcept C172385210 @default.
- W2155083346 hasConcept C192562407 @default.
- W2155083346 hasConcept C2361726 @default.
- W2155083346 hasConcept C25356406 @default.
- W2155083346 hasConcept C2778413303 @default.
- W2155083346 hasConcept C2779227376 @default.
- W2155083346 hasConcept C2780901251 @default.
- W2155083346 hasConcept C49040817 @default.
- W2155083346 hasConcept C53143962 @default.
- W2155083346 hasConcept C544956773 @default.
- W2155083346 hasConceptScore W2155083346C119599485 @default.
- W2155083346 hasConceptScore W2155083346C123671423 @default.
- W2155083346 hasConceptScore W2155083346C127413603 @default.
- W2155083346 hasConceptScore W2155083346C14485415 @default.
- W2155083346 hasConceptScore W2155083346C159985019 @default.
- W2155083346 hasConceptScore W2155083346C165801399 @default.
- W2155083346 hasConceptScore W2155083346C172385210 @default.
- W2155083346 hasConceptScore W2155083346C192562407 @default.
- W2155083346 hasConceptScore W2155083346C2361726 @default.
- W2155083346 hasConceptScore W2155083346C25356406 @default.
- W2155083346 hasConceptScore W2155083346C2778413303 @default.
- W2155083346 hasConceptScore W2155083346C2779227376 @default.
- W2155083346 hasConceptScore W2155083346C2780901251 @default.
- W2155083346 hasConceptScore W2155083346C49040817 @default.
- W2155083346 hasConceptScore W2155083346C53143962 @default.
- W2155083346 hasConceptScore W2155083346C544956773 @default.
- W2155083346 hasLocation W21550833461 @default.
- W2155083346 hasOpenAccess W2155083346 @default.
- W2155083346 hasPrimaryLocation W21550833461 @default.
- W2155083346 hasRelatedWork W1971662529 @default.
- W2155083346 hasRelatedWork W1986966856 @default.
- W2155083346 hasRelatedWork W1996849165 @default.
- W2155083346 hasRelatedWork W2010948013 @default.
- W2155083346 hasRelatedWork W2014907747 @default.
- W2155083346 hasRelatedWork W2028438170 @default.
- W2155083346 hasRelatedWork W2065585751 @default.
- W2155083346 hasRelatedWork W2099133288 @default.
- W2155083346 hasRelatedWork W2136302613 @default.
- W2155083346 hasRelatedWork W2136825123 @default.
- W2155083346 hasRelatedWork W2166304146 @default.
- W2155083346 hasRelatedWork W2167512130 @default.
- W2155083346 hasRelatedWork W2358506198 @default.
- W2155083346 hasRelatedWork W2944886287 @default.
- W2155083346 hasRelatedWork W3143873673 @default.
- W2155083346 hasRelatedWork W3146647323 @default.
- W2155083346 hasRelatedWork W2183332552 @default.
- W2155083346 hasRelatedWork W2284752792 @default.
- W2155083346 hasRelatedWork W3097640304 @default.
- W2155083346 hasRelatedWork W3151903908 @default.
- W2155083346 isParatext "false" @default.
- W2155083346 isRetracted "false" @default.
- W2155083346 magId "2155083346" @default.
- W2155083346 workType "article" @default.