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- W2155139368 endingPage "440" @default.
- W2155139368 startingPage "433" @default.
- W2155139368 abstract "Two types of copper seed layers deposited by MOCVD and long throw sputtering (LTS) onto a tantalum barrier layer were used for electroplating (EP) of copper in the forward pulsed mode. MOCVD and PVD copper seed layers were compared with respect to step coverage, electrical resistivity, texture and adhesion behaviour. The different properties induce different electroplating fill attributes, including grain size and adhesion behaviour. MOCVD Cu seed layers show high step coverage, but do not adhere to the Ta barrier after the Cu EP. LTS Cu reveal strong (111) texture and excellent adhesion before and after Cu EP. Therefore, a CMP process could only be performed on patterned wafers with PVD/EP copper to obtain electrical data. The fabricated Cu lines show a high yield with respect to opens and shorts and standard deviations of the line resistance across the wafer." @default.
- W2155139368 created "2016-06-24" @default.
- W2155139368 creator A5023131646 @default.
- W2155139368 creator A5030507694 @default.
- W2155139368 creator A5039548269 @default.
- W2155139368 creator A5047693293 @default.
- W2155139368 creator A5050134532 @default.
- W2155139368 creator A5060204434 @default.
- W2155139368 creator A5062392870 @default.
- W2155139368 date "2000-01-01" @default.
- W2155139368 modified "2023-10-14" @default.
- W2155139368 title "Development of different copper seed layers with respect to the copper electroplating process" @default.
- W2155139368 cites W2525360242 @default.
- W2155139368 doi "https://doi.org/10.1016/s0167-9317(99)00312-3" @default.
- W2155139368 hasPublicationYear "2000" @default.
- W2155139368 type Work @default.
- W2155139368 sameAs 2155139368 @default.
- W2155139368 citedByCount "52" @default.
- W2155139368 countsByYear W21551393682012 @default.
- W2155139368 countsByYear W21551393682013 @default.
- W2155139368 countsByYear W21551393682014 @default.
- W2155139368 countsByYear W21551393682015 @default.
- W2155139368 countsByYear W21551393682016 @default.
- W2155139368 countsByYear W21551393682017 @default.
- W2155139368 countsByYear W21551393682018 @default.
- W2155139368 countsByYear W21551393682020 @default.
- W2155139368 countsByYear W21551393682021 @default.
- W2155139368 crossrefType "journal-article" @default.
- W2155139368 hasAuthorship W2155139368A5023131646 @default.
- W2155139368 hasAuthorship W2155139368A5030507694 @default.
- W2155139368 hasAuthorship W2155139368A5039548269 @default.
- W2155139368 hasAuthorship W2155139368A5047693293 @default.
- W2155139368 hasAuthorship W2155139368A5050134532 @default.
- W2155139368 hasAuthorship W2155139368A5060204434 @default.
- W2155139368 hasAuthorship W2155139368A5062392870 @default.
- W2155139368 hasConcept C110738630 @default.
- W2155139368 hasConcept C115961682 @default.
- W2155139368 hasConcept C119599485 @default.
- W2155139368 hasConcept C127413603 @default.
- W2155139368 hasConcept C154945302 @default.
- W2155139368 hasConcept C159985019 @default.
- W2155139368 hasConcept C160671074 @default.
- W2155139368 hasConcept C175665537 @default.
- W2155139368 hasConcept C191897082 @default.
- W2155139368 hasConcept C192562407 @default.
- W2155139368 hasConcept C2778112282 @default.
- W2155139368 hasConcept C2779227376 @default.
- W2155139368 hasConcept C2779833192 @default.
- W2155139368 hasConcept C2781195486 @default.
- W2155139368 hasConcept C29216876 @default.
- W2155139368 hasConcept C41008148 @default.
- W2155139368 hasConcept C49040817 @default.
- W2155139368 hasConcept C514619126 @default.
- W2155139368 hasConcept C51807945 @default.
- W2155139368 hasConcept C544778455 @default.
- W2155139368 hasConcept C69990965 @default.
- W2155139368 hasConcept C84416704 @default.
- W2155139368 hasConceptScore W2155139368C110738630 @default.
- W2155139368 hasConceptScore W2155139368C115961682 @default.
- W2155139368 hasConceptScore W2155139368C119599485 @default.
- W2155139368 hasConceptScore W2155139368C127413603 @default.
- W2155139368 hasConceptScore W2155139368C154945302 @default.
- W2155139368 hasConceptScore W2155139368C159985019 @default.
- W2155139368 hasConceptScore W2155139368C160671074 @default.
- W2155139368 hasConceptScore W2155139368C175665537 @default.
- W2155139368 hasConceptScore W2155139368C191897082 @default.
- W2155139368 hasConceptScore W2155139368C192562407 @default.
- W2155139368 hasConceptScore W2155139368C2778112282 @default.
- W2155139368 hasConceptScore W2155139368C2779227376 @default.
- W2155139368 hasConceptScore W2155139368C2779833192 @default.
- W2155139368 hasConceptScore W2155139368C2781195486 @default.
- W2155139368 hasConceptScore W2155139368C29216876 @default.
- W2155139368 hasConceptScore W2155139368C41008148 @default.
- W2155139368 hasConceptScore W2155139368C49040817 @default.
- W2155139368 hasConceptScore W2155139368C514619126 @default.
- W2155139368 hasConceptScore W2155139368C51807945 @default.
- W2155139368 hasConceptScore W2155139368C544778455 @default.
- W2155139368 hasConceptScore W2155139368C69990965 @default.
- W2155139368 hasConceptScore W2155139368C84416704 @default.
- W2155139368 hasIssue "1-4" @default.
- W2155139368 hasLocation W21551393681 @default.
- W2155139368 hasOpenAccess W2155139368 @default.
- W2155139368 hasPrimaryLocation W21551393681 @default.
- W2155139368 hasRelatedWork W2038239546 @default.
- W2155139368 hasRelatedWork W2061131204 @default.
- W2155139368 hasRelatedWork W2098588353 @default.
- W2155139368 hasRelatedWork W2103252801 @default.
- W2155139368 hasRelatedWork W2155139368 @default.
- W2155139368 hasRelatedWork W2157231772 @default.
- W2155139368 hasRelatedWork W2355234100 @default.
- W2155139368 hasRelatedWork W2364682743 @default.
- W2155139368 hasRelatedWork W2384413781 @default.
- W2155139368 hasRelatedWork W832388664 @default.
- W2155139368 hasVolume "50" @default.
- W2155139368 isParatext "false" @default.
- W2155139368 isRetracted "false" @default.
- W2155139368 magId "2155139368" @default.
- W2155139368 workType "article" @default.