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- W2155201576 abstract "This paper presents the development of a floating-element shear stress sensor that permits the direct measurement of skin friction based on geometric Moir interferometry. The sensor was fabricated using an aligned wafer-bond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Experimental characterization indicates a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/(square root)Hz." @default.
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- W2155201576 date "2004-01-05" @default.
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- W2155201576 title "A Micromachined Geometric Moiré Interferometric Floating-Element Shear Stress Sensor" @default.
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- W2155201576 doi "https://doi.org/10.2514/6.2004-1042" @default.
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