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- W2155202370 abstract "Design and fabrication of an electrostatic vertical actuator is reported. This actuator has been constructed using a multi-level, LIGA-like process. The process uses diamond lapping and polishing for replanarization of electroplated surfaces after the first LIGA cycle. This allows a second layer of photoresist to be bonded to the surface and therefore a second LIGA cycle can follow. In this actuator, force outputs in the milli-Newton range, and a vertical displacement of hundreds of microns appear to be feasible." @default.
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- W2155202370 date "2002-12-23" @default.
- W2155202370 modified "2023-09-27" @default.
- W2155202370 title "A multi-level, LIGA-like process for three dimensional actuators" @default.
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- W2155202370 doi "https://doi.org/10.1109/memsys.1996.493995" @default.
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