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- W2155261096 abstract "The physical and chemical effects and particularly the impact of Phosphosilicate glass (LTO-PSG) composition on manufacturing of Opto and Small Signal devices is reviewed in detail. Statistical design and response surface methodology (RSM) are extensively used to optimize the process conditions of PSG film for reliable fabrication of these devices. This paper focuses on LTO-PSG deposition variables and how the deposition conditions can be optimized for the best process conditions. Finally, the effect of percentage of Phosphorous in LTO-PSG is discussed in terms of photolithography etch process simplification." @default.
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- W2155261096 date "2002-12-24" @default.
- W2155261096 modified "2023-09-27" @default.
- W2155261096 title "Statistical characterization and the impact of percent phosphorous in LTO-PSG film on opto and small signal technology" @default.
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- W2155261096 doi "https://doi.org/10.1109/smelec.1996.616469" @default.
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