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- W2155709496 abstract "In this paper we present experimental work towards the fabrication of a high-overtone bulk acoustic resonator (HBAR) that demonstrates large values of quality factor (Q) at high frequency (> 7GHz). We have optimized electrode design and fabrication technique with respect to deposition conditions, material, active-area size, and thickness. We fabricated devices with gold, aluminum, and molybdenum electrodes. Once the molybdenum electrodes were determined to be superior, we fabricated devices with 11 different active-area sizes, ranging from 5,300 ¿m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> to 23,600 ¿m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . Finally, we made HBARs with electrode thickness ranging, in 0.02 ¿m increments, from 0.06 ¿m to 0.14 ¿m. The best device utilized 0.14 ¿m thick molybdenum electrodes, an active-area of 6,500 ¿m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , and had Q = 6501 at 7.520 GHz, yielding fQ = 4.49 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>13</sup> ." @default.
- W2155709496 created "2016-06-24" @default.
- W2155709496 creator A5034100769 @default.
- W2155709496 creator A5046110835 @default.
- W2155709496 date "2009-09-01" @default.
- W2155709496 modified "2023-09-26" @default.
- W2155709496 title "Experimental optimization of electrodes for high Q, high frequency HBAR" @default.
- W2155709496 cites W1971712552 @default.
- W2155709496 cites W2010792004 @default.
- W2155709496 cites W2020141713 @default.
- W2155709496 cites W2038945455 @default.
- W2155709496 cites W2060415336 @default.
- W2155709496 cites W2086725199 @default.
- W2155709496 cites W2098216301 @default.
- W2155709496 cites W2102624141 @default.
- W2155709496 cites W2118269349 @default.
- W2155709496 cites W2150175861 @default.
- W2155709496 doi "https://doi.org/10.1109/ultsym.2009.5441814" @default.
- W2155709496 hasPublicationYear "2009" @default.
- W2155709496 type Work @default.
- W2155709496 sameAs 2155709496 @default.
- W2155709496 citedByCount "12" @default.
- W2155709496 countsByYear W21557094962013 @default.
- W2155709496 countsByYear W21557094962015 @default.
- W2155709496 countsByYear W21557094962016 @default.
- W2155709496 countsByYear W21557094962018 @default.
- W2155709496 countsByYear W21557094962021 @default.
- W2155709496 countsByYear W21557094962022 @default.
- W2155709496 countsByYear W21557094962023 @default.
- W2155709496 crossrefType "proceedings-article" @default.
- W2155709496 hasAuthorship W2155709496A5034100769 @default.
- W2155709496 hasAuthorship W2155709496A5046110835 @default.
- W2155709496 hasConcept C113196181 @default.
- W2155709496 hasConcept C121332964 @default.
- W2155709496 hasConcept C1276947 @default.
- W2155709496 hasConcept C136525101 @default.
- W2155709496 hasConcept C142724271 @default.
- W2155709496 hasConcept C17525397 @default.
- W2155709496 hasConcept C178790620 @default.
- W2155709496 hasConcept C185592680 @default.
- W2155709496 hasConcept C191897082 @default.
- W2155709496 hasConcept C192562407 @default.
- W2155709496 hasConcept C204787440 @default.
- W2155709496 hasConcept C38615331 @default.
- W2155709496 hasConcept C4839761 @default.
- W2155709496 hasConcept C49040817 @default.
- W2155709496 hasConcept C549387045 @default.
- W2155709496 hasConcept C62520636 @default.
- W2155709496 hasConcept C71924100 @default.
- W2155709496 hasConcept C97126364 @default.
- W2155709496 hasConceptScore W2155709496C113196181 @default.
- W2155709496 hasConceptScore W2155709496C121332964 @default.
- W2155709496 hasConceptScore W2155709496C1276947 @default.
- W2155709496 hasConceptScore W2155709496C136525101 @default.
- W2155709496 hasConceptScore W2155709496C142724271 @default.
- W2155709496 hasConceptScore W2155709496C17525397 @default.
- W2155709496 hasConceptScore W2155709496C178790620 @default.
- W2155709496 hasConceptScore W2155709496C185592680 @default.
- W2155709496 hasConceptScore W2155709496C191897082 @default.
- W2155709496 hasConceptScore W2155709496C192562407 @default.
- W2155709496 hasConceptScore W2155709496C204787440 @default.
- W2155709496 hasConceptScore W2155709496C38615331 @default.
- W2155709496 hasConceptScore W2155709496C4839761 @default.
- W2155709496 hasConceptScore W2155709496C49040817 @default.
- W2155709496 hasConceptScore W2155709496C549387045 @default.
- W2155709496 hasConceptScore W2155709496C62520636 @default.
- W2155709496 hasConceptScore W2155709496C71924100 @default.
- W2155709496 hasConceptScore W2155709496C97126364 @default.
- W2155709496 hasLocation W21557094961 @default.
- W2155709496 hasOpenAccess W2155709496 @default.
- W2155709496 hasPrimaryLocation W21557094961 @default.
- W2155709496 hasRelatedWork W1498118868 @default.
- W2155709496 hasRelatedWork W1607322111 @default.
- W2155709496 hasRelatedWork W1974836613 @default.
- W2155709496 hasRelatedWork W2006250182 @default.
- W2155709496 hasRelatedWork W2020141713 @default.
- W2155709496 hasRelatedWork W2039942051 @default.
- W2155709496 hasRelatedWork W2050011169 @default.
- W2155709496 hasRelatedWork W2106511925 @default.
- W2155709496 hasRelatedWork W4283762479 @default.
- W2155709496 hasRelatedWork W2118092804 @default.
- W2155709496 isParatext "false" @default.
- W2155709496 isRetracted "false" @default.
- W2155709496 magId "2155709496" @default.
- W2155709496 workType "article" @default.