FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2155888897> ?p ?o ?g. }

• W2155888897 endingPage "4118" @default.
• W2155888897 startingPage "4115" @default.
• W2155888897 abstract "In this work, Y2O3 was evaluated as a gate insulator for thin film transistors fabricated using an amorphous InGaZnO4 (a-IGZO) active layer. The properties of Y2O3 were examined as a function of various processing parameters including plasma power, chamber gas conditions, and working pressure. The leakage current density for the Y2O3 film prepared under the optimum conditions was observed to be ~ 3.5 × 10− 9 A/cm2 at an electric field of 1 MV/cm. The RMS roughness of the Y2O3 film was improved from 1.6 nm to 0.8 nm by employing an ALD (Atomic Layer Deposition) HfO2 underlayer. Using the optimized Y2O3 deposition conditions, thin film transistors (TFTs) were fabricated on a glass substrate. The important TFT device parameters of the on/off current ratio, sub-threshold swing, threshold voltage, and electric field mobility were measured to be 7.0 × 107, 0.18 V/dec, 1.1 V, and 3.3 cm2/Vs, respectively. The stacked insulator consisting of Y2O3/HfO2 was highly effective in enhancing the device properties." @default.
• W2155888897 created "2016-06-24" @default.
• W2155888897 creator A5004079722 @default.
• W2155888897 creator A5018236205 @default.
• W2155888897 creator A5053620213 @default.
• W2155888897 creator A5086210184 @default.
• W2155888897 creator A5087022737 @default.
• W2155888897 date "2009-05-01" @default.
• W2155888897 modified "2023-10-05" @default.
• W2155888897 title "Evaluation of Y2O3 gate insulators for a-IGZO thin film transistors" @default.
• W2155888897 cites W1975254661 @default.
• W2155888897 cites W1976250511 @default.
• W2155888897 cites W1999589524 @default.
• W2155888897 cites W2002727617 @default.
• W2155888897 cites W2018540978 @default.
• W2155888897 cites W2046791610 @default.
• W2155888897 cites W2052998418 @default.
• W2155888897 cites W2093940058 @default.
• W2155888897 cites W2133693435 @default.
• W2155888897 cites W2134960271 @default.
• W2155888897 cites W2138586628 @default.
• W2155888897 doi "https://doi.org/10.1016/j.tsf.2009.02.020" @default.
• W2155888897 hasPublicationYear "2009" @default.
• W2155888897 type Work @default.
• W2155888897 sameAs 2155888897 @default.
• W2155888897 citedByCount "76" @default.
• W2155888897 countsByYear W21558888972012 @default.
• W2155888897 countsByYear W21558888972013 @default.
• W2155888897 countsByYear W21558888972014 @default.
• W2155888897 countsByYear W21558888972015 @default.
• W2155888897 countsByYear W21558888972016 @default.
• W2155888897 countsByYear W21558888972017 @default.
• W2155888897 countsByYear W21558888972018 @default.
• W2155888897 countsByYear W21558888972019 @default.
• W2155888897 countsByYear W21558888972020 @default.
• W2155888897 countsByYear W21558888972021 @default.
• W2155888897 countsByYear W21558888972023 @default.
• W2155888897 crossrefType "journal-article" @default.
• W2155888897 hasAuthorship W2155888897A5004079722 @default.
• W2155888897 hasAuthorship W2155888897A5018236205 @default.
• W2155888897 hasAuthorship W2155888897A5053620213 @default.
• W2155888897 hasAuthorship W2155888897A5086210184 @default.
• W2155888897 hasAuthorship W2155888897A5087022737 @default.
• W2155888897 hasConcept C107365816 @default.
• W2155888897 hasConcept C111368507 @default.
• W2155888897 hasConcept C115235246 @default.
• W2155888897 hasConcept C119599485 @default.
• W2155888897 hasConcept C121332964 @default.
• W2155888897 hasConcept C127313418 @default.
• W2155888897 hasConcept C127413603 @default.
• W2155888897 hasConcept C139719470 @default.
• W2155888897 hasConcept C159985019 @default.
• W2155888897 hasConcept C162324750 @default.
• W2155888897 hasConcept C165801399 @default.
• W2155888897 hasConcept C171250308 @default.
• W2155888897 hasConcept C172385210 @default.
• W2155888897 hasConcept C178790620 @default.
• W2155888897 hasConcept C185592680 @default.
• W2155888897 hasConcept C19067145 @default.
• W2155888897 hasConcept C192562407 @default.
• W2155888897 hasConcept C195370968 @default.
• W2155888897 hasConcept C212702 @default.
• W2155888897 hasConcept C2777042071 @default.
• W2155888897 hasConcept C2777289219 @default.
• W2155888897 hasConcept C2779227376 @default.
• W2155888897 hasConcept C49040817 @default.
• W2155888897 hasConcept C56052488 @default.
• W2155888897 hasConcept C60799052 @default.
• W2155888897 hasConcept C62520636 @default.
• W2155888897 hasConcept C69544855 @default.
• W2155888897 hasConcept C87359718 @default.
• W2155888897 hasConceptScore W2155888897C107365816 @default.
• W2155888897 hasConceptScore W2155888897C111368507 @default.
• W2155888897 hasConceptScore W2155888897C115235246 @default.
• W2155888897 hasConceptScore W2155888897C119599485 @default.
• W2155888897 hasConceptScore W2155888897C121332964 @default.
• W2155888897 hasConceptScore W2155888897C127313418 @default.
• W2155888897 hasConceptScore W2155888897C127413603 @default.
• W2155888897 hasConceptScore W2155888897C139719470 @default.
• W2155888897 hasConceptScore W2155888897C159985019 @default.
• W2155888897 hasConceptScore W2155888897C162324750 @default.
• W2155888897 hasConceptScore W2155888897C165801399 @default.
• W2155888897 hasConceptScore W2155888897C171250308 @default.
• W2155888897 hasConceptScore W2155888897C172385210 @default.
• W2155888897 hasConceptScore W2155888897C178790620 @default.
• W2155888897 hasConceptScore W2155888897C185592680 @default.
• W2155888897 hasConceptScore W2155888897C19067145 @default.
• W2155888897 hasConceptScore W2155888897C192562407 @default.
• W2155888897 hasConceptScore W2155888897C195370968 @default.
• W2155888897 hasConceptScore W2155888897C212702 @default.
• W2155888897 hasConceptScore W2155888897C2777042071 @default.
• W2155888897 hasConceptScore W2155888897C2777289219 @default.
• W2155888897 hasConceptScore W2155888897C2779227376 @default.
• W2155888897 hasConceptScore W2155888897C49040817 @default.
• W2155888897 hasConceptScore W2155888897C56052488 @default.
• W2155888897 hasConceptScore W2155888897C60799052 @default.
• W2155888897 hasConceptScore W2155888897C62520636 @default.
• W2155888897 hasConceptScore W2155888897C69544855 @default.

• next